Abstract
An atomic sized probe with large current, provided by spherical aberration corrector, allows us to determine a site of atom column and specify its atomic species using electron energy loss spectrometer in recent analytical microscope [1–3]. Z contrast in scanning transmission electron microscopy (STEM) is commonly obtained by high angle annular dark field electron microscopy (HAADF). On the other hand, backscattered electron (BSE) microscopy also provides Z contrast, which is commonly used in scanning electron microscopy for bulk specimen. The investigations of BSE imaging, with aberration corrected microscope, have been remained because of low yield of BSE. We report BSE imaging with a with large probe current provided by aberration corrected microscope.
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References
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Okunishi, E. et al. (2008). Back-Scattered Electron microscopy in Aberration corrected Electron microscope. In: Luysberg, M., Tillmann, K., Weirich, T. (eds) EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_22
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DOI: https://doi.org/10.1007/978-3-540-85156-1_22
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-85154-7
Online ISBN: 978-3-540-85156-1
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