An Integrated Mechatronics Approach to Ultra-Precision Devices for Applications in Micro and Nanotechnology

Abstract

An effort to optimise both mechanical and electronic/control components of ultra-precision devices is presented. The considered mechanics is compliant, which overcomes the non-linearities of conventional devices. Design guidelines for hinge optimisation are given and a preliminary consideration of the scaling effects is performed. The developed control system is based on a rapid controller prototyping platform consisting of a Compact-PCI system running under the Linux RTAI real-time extension.

The work was performed within the project “Ultra-high precision compliant devices for micro and nanotechnology applications” of the Croatian Ministry of Science, Education and Sports and the project “A stronger Europe with micro and nanotechnologies (SEMINA)” of the Swiss National Science Foundation.