Abstract
This paper overviews various components of MEMS drug delivery devices in medical application such as micropumps, microvalves, microactuator and microneedles, using biocompatible material such as silicon. The review will focus on micropumps structures in different actuators. The electrostatic actuated micropumps and circular bossed membrane were found out to be the most suitable device for medical application and offer better linearity pumping rate respectively.
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Karman, S., Ibrahim, F., Soin, N. (2007). A review of MEMS drug delivery in medical application. In: Ibrahim, F., Osman, N.A.A., Usman, J., Kadri, N.A. (eds) 3rd Kuala Lumpur International Conference on Biomedical Engineering 2006. IFMBE Proceedings, vol 15. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-68017-8_80
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DOI: https://doi.org/10.1007/978-3-540-68017-8_80
Publisher Name: Springer, Berlin, Heidelberg
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