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Comparative Evaluation of Electrical Properties of Carbon Nanotube Networks Deposited on CMOS-Compatible Platform

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Recent Advances in Technology Research and Education (Inter-Academia 2023)

Part of the book series: Lecture Notes in Networks and Systems ((LNNS,volume 939))

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Abstract

Carbon nanotubes (CNTs) can be used as channel material in a nanoscale or microscale gap between conducting electrodes. The contact potential of CNT-bundles deposited by inkjet-printing was measured by KFM (Kelvin probe force microscopy) using Pt-coated Si tips in ultra-high vacuum (~10–8 Pa). By comparing these results with electrical characteristics, SEM (scanning electron microscopy) and AFM (atomic force microscopy) measurements, we confirmed that the inkjet-printed CNT-bundles bridged the nanogap between different electrodes. Using this KFM technique, it can be shown how the potential of the CNT-bundles changes under the application of voltages. Combining these results, we investigate the electrical properties of CNT-networks deposited on CMOS-compatible platforms, aiming towards the development of hybrid nanoelectronics.

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Acknowledgments

This work was partially supported by JSPS KAKENHI (no. 19K04529 and no. 22K04216), and a Cooperative Research Project from the Research Institute of Electronics, Shizuoka University. The authors thank K. Takagi, T. Aoki, J. H. Moon, Y. Neo, F. Iwata, and H. Mimura for their support during the inkjet-printing and AFM manipulation, as well as for useful discussions.

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Correspondence to Daniel Moraru .

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Kawanishi, H., Singh, R.S., Ramakrishnan, V.N., Shimomura, M., Moraru, D. (2024). Comparative Evaluation of Electrical Properties of Carbon Nanotube Networks Deposited on CMOS-Compatible Platform. In: Ono, Y., Kondoh, J. (eds) Recent Advances in Technology Research and Education. Inter-Academia 2023. Lecture Notes in Networks and Systems, vol 939. Springer, Cham. https://doi.org/10.1007/978-3-031-54450-7_9

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