Abstract
Developed in NAU “Kharkiv Aviation Institute” inverse magnetron sputtering system with sectioned cathode units and axial plasma flows allows to obtain multicomponent, multilayer and functional-gradient coatings. The advantage is shown over currently used technological ion-plasma generators. It is concluded that it is necessary to develop a mathematical model that allows one to calculate the operating parameters of the sputtering system. These parameters are to be known to obtain coatings of a given composition and thickness. It is shown that to solve this problem it is necessary to develop a numerical model for calculating the distribution of local plasma parameters in the discharge gap of an inverse magnetron sputtering system with sectioned cathode units and axial plasma flows. To solve this problem, a fluid plasma model was used. The distributions of the plasma potential, electron temperature and density in the discharge gap of the investigated sputtering system were obtained. Based on comparison of these calculated parameters with experimental data, the conclusion was made about the correctness of the developed mathematical model. Noted that in order to complete the development of a mathematical model for calculation the deposition rate and composition of the coating for an inverse magnetron sputtering system with sectioned cathode units and axial plasma flows, it is necessary to develop a mathematical model for calculating the distribution of the ion current density over the surface of the target cathodes and the energy of the bombarding cathode ions.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
Movchan, B., Yakovchuk, K.: High-temperature protective coatings produced by EB-PVD. J. Coat. Sci. Technol. 1(2), 96–110 (2014)
Chang, K.S., Chen, K.T., Hsu, C.Y., Hong, P.D.: Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system. Appl. Surf. Sci. 440, 1–7 (2018). https://doi.org/10.1016/j.apsusc.2018.01.110
Muboyadzhyan, S.A., Egorova, L.P., Gorlov, D.S., Bulavintseva, E.E.: Corrosion-resistant coating for GTE compressor parts made of steels with low tempering temperatures. Russ. Metall. (Met.) 2017(1), 1–9 (2017). https://doi.org/10.1134/S0036029517010086
Li, W., Liu, P., Liaw, P.K.: Microstructures and properties of high-entropy alloy films and coatings: a review. Mater. Res. Lett. 6(4), 199–229 (2018). https://doi.org/10.1080/21663831.2018.1434248
Yan, X.H., Li, J.S., Zhang, W.R., Zhang, Y.: A brief review of high-entropy films. Mater. Chem. Phys. 210, 12–19 (2018). https://doi.org/10.1016/j.matchemphys.2017.07.078
Dolique, V., Thomann, A.L., Brault, P.: High-entropy alloys deposited by magnetron sputtering. IEEE Trans. Plasma Sci. 39(11), 2478–2479 (2011). https://doi.org/10.1109/TPS.2011.2157942
Isakov, A., Kolesnik, V., Okhrimovskyy, A., et al.: Computer simulation of abnormal glow discharge processes in crossed electric and magnetic fields. Probl. At. Sci. Technol. 6, 171–174 (2014)
Thornton, J.A., Penfold, A.S.: Cylindrical Magnetron Sputtering: Thin Film Processes. Academic Press, New York (1978)
Sliusar, D.: Method of formation of two-dimensional functionally graded coatings. Dissertation, National Aerospace University “Kharkiv Aviation Institute” (2014). [in Russian]
Markosyan, A., Teunissen, J., Dujko, S., Ebert, U.: Comparing plasma fluid models of different order for 1D streamer ionization fronts. Plasma Sources Sci. Technol. 24(6), 065002 (2015). https://doi.org/10.1088/0963-0252/24/6/065002
Gudmundsson, J., Lundin, D., Brenning, N., et al.: An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge. Plasma Sources Sci. Technol. 25(6), 065004 (2016). https://doi.org/10.1088/0963-0252/25/6/065004
Kudrna, P., Passoth, E.: Langmuir probe diagnostics of a low temperature non-isothermal plasma in a weak magnetic field. Contrib. Plasma Phys. 37, 417–429 (1997). https://doi.org/10.1002/ctpp.2150370504
Hutchinson, I.H.: Principles of Plasma Diagnostics, 2nd edn. Cambridge University Press, Cambridge (2005)
Ryan, P.J., Bradley, J.W., Bowden, M.D.: Comparison of Langmuir probe and laser Thomson scattering for electron property measurements in magnetron discharges. Phys. Plasmas 26(7), 073515 (2019). https://doi.org/10.1063/1.5109621
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2021 The Author(s), under exclusive license to Springer Nature Switzerland AG
About this paper
Cite this paper
Sliusar, D., Isakov, O., Kolesnyk, V., Chugai, O., Litovchenko, L., Stepanushkin, M. (2021). Computer Simulation of Abnormal Glow Discharge in an Inverse Magnetron Sputtering System with Axial Plasma Flows. In: Nechyporuk, M., Pavlikov, V., Kritskiy, D. (eds) Integrated Computer Technologies in Mechanical Engineering - 2020. ICTM 2020. Lecture Notes in Networks and Systems, vol 188. Springer, Cham. https://doi.org/10.1007/978-3-030-66717-7_47
Download citation
DOI: https://doi.org/10.1007/978-3-030-66717-7_47
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-66716-0
Online ISBN: 978-3-030-66717-7
eBook Packages: EngineeringEngineering (R0)