Numerical Case Studies: Forward Problems

  • Paolo Di BarbaEmail author
  • Maria Evelina Mognaschi
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 573)


Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.


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© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.Department of Electrical, Computer and Biomedical EngineeringUniversity of PaviaPaviaItaly

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