MEMS: Field Models and Optimal Design

  • Paolo Di Barba
  • Slawomir Wiak

Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 573)

Table of contents

  1. Front Matter
    Pages i-ix
  2. Paolo Di Barba, Slawomir Wiak
    Pages 1-3
  3. Paolo Di Barba, Slawomir Wiak
    Pages 5-7
  4. Paolo Di Barba, Slawomir Wiak
    Pages 9-29
  5. Paolo Di Barba, Slawomir Wiak
    Pages 31-45
  6. Paolo Di Barba, Slawomir Wiak
    Pages 47-53
  7. Paolo Di Barba, Slawomir Wiak
    Pages 55-64
  8. Paolo Di Barba, Slawomir Wiak
    Pages 65-67
  9. Paolo Di Barba, Slawomir Wiak
    Pages 69-78
  10. Paolo Di Barba, Slawomir Wiak
    Pages 79-90
  11. Paolo Di Barba, Slawomir Wiak
    Pages 91-100
  12. Paolo Di Barba, Maria Evelina Mognaschi
    Pages 101-113
  13. Teodor Gotszalk
    Pages 115-141
  14. Paolo Di Barba, Maria Evelina Mognaschi
    Pages 143-168
  15. Maria Evelina Mognaschi
    Pages 169-185
  16. Back Matter
    Pages 187-190

About this book


This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.


Maxwell’s equations Finite-element analysis Coupled field problems Optimal shape design Multiobjective optimization Theory of Pareto optimality Field-based MEMS modeling Lumped-parameter models Distributed-parameter models Boundary-value problem Numerical methods for MEMS design

Authors and affiliations

  • Paolo Di Barba
    • 1
  • Slawomir Wiak
    • 2
  1. 1.Department of Electrical, Computer and Biomedical EngineeringUniversity of PaviaPaviaItaly
  2. 2.Institute of Mechatronis and Information SystemsLodzPoland

Bibliographic information

  • DOI
  • Copyright Information Springer Nature Switzerland AG 2020
  • Publisher Name Springer, Cham
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-3-030-21495-1
  • Online ISBN 978-3-030-21496-8
  • Series Print ISSN 1876-1100
  • Series Online ISSN 1876-1119
  • Buy this book on publisher's site