Abstract
Lithography plays a central role in the fabrication of electronic devices. The minimum feature size required in the device is important in the choice of lithographic method. Generally for linewidths above 1μm linewidth optical lithography is used whilst for smaller dimensions it is necessary to use electron, ion beam or X-ray lithography. The linewidths in current production VLSI circuits range between 1 and 3μm; there are programs in the U.S. and the U.K. to reduce the linewidth to 0.5μm over the next few years(1). Single conventional semiconducting electronic devices have been made with gates as small as 0.1μm and some experimental superconducting devices employ features with sizes in the 10–30nm range.
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References
J.H. Hains, The Government Role in VLSI Chap. 7 of VLSI Electronics Microstructure Science, Vol. 1, ed. N.G. Einspruch, Academic Press, N.Y., 1981.
S.P. Beaumont, P.G. Bower, T. Tamamura and C.D.W. Wilkinson, Sub 20nm Wide Metal Lines by Electron Beam Exposure of Thin PMMA Films and Liftoff,. Appl. Phys. Lett. 38, 436, 1981.
G.R. Brewer, Electron Beam Technology in Microelectronic Fabrication, Academic Press, New York, 1980.
J. Kelly, T. Groves and H.P. Kuo, A High-Current High-Speed Electron Beam Lithography Column, J.Vac.Sci. Technol., 19, 936–940 (1981)
R.D. Moore, G.A. Caccoma, H.C. Pfeiffer, E.V. Weber and O.C. Woodward, EL-3 A High Throughput High Resolution Lithography Tool, J. Vac. Sci. Technol., 19, 950–952 (1981).
M. Fujinami, T. Matsuda, K. Takamoto, H. Yoda, T. Ishiga, N. Saitu and T. Komoda, Variably Shaped Electron Beam Lithography System EB-55, J.Vac. Sci. Technol., 19, 941–945, (1981).
H.G. Craighead, R.E. Howard, L.D. Jackel and P.M. Mankiewich, 10 nm Linewidth Electron Beam Lithography on GaAs, Appl. Phys. Letts., 42, 38–40 (1983).
A.N. Broers, W.W. Molzen, J.J. Cuomo and N.D. Witteis, Electron Beam Fabrication of 80 Metal Structures, Appl. Phys. Lett., 29, 596–598 (1976).
M. Isaacson and A. Murray, In-situ Vapourization of Very Low Molecular Weight Resists Using 1/2 nm Diameter Electron Beams, J. Vac. Sci. Technol., 19, 1117–20, (1981).
R.L. Seliger, J.W. Ward, V. Wang and R.S. Kubena, A High Intensity Scanning Ion Probe with Submicrometer Spot Size, Apply. Phys. Lett., 34, 310–312, (1979).
H.I. Smith, P.L. Spears and S.E. Bernacki, X-Ray Lithography: A Complementary Technique to Electron Beam Lithography, J. Vac. Sci. Tech., 10, 913–917, (1973).
S.E. Bernacki and H.I. Smith, Fabrication of Silicon MOS Devices Using X-Ray Lithography, IEEE Trans. El. Devices, ED-22, 421–428 (1975).
D. Maydan, G.A. Coquin, J.R. Maldonado, S. Somekh, D.Y. Lou and G.N. Taylor, High Speed Replication of Submicron Features on Large Areas by X-Ray Lithography, IEEE Trans, El. Devices, ED-22, 429–433, (1975).
W.D. Grobman, Synchrotron Radiation X-Ray Lithography, in Handbook on Synchrotron Radiation Vol. I, ed. E.E. Koch, D.E. Eastman and Y. Farge, North Holand (1980).
M. Sekimoto, H. Yoshira, T. Ohtaubo and Y. Saiton, Silicon Nitride Single-Layer X-Ray Maskm Jap J. Appl. Phys. 20, L667–672, (1981).
D.C. Flanders and H.I. Smith, Polyimide Membrane X-Ray Lithography Masks-Fabrication and Distortion Measurements, J. Vac. Sci. Technol., 15, 995–997, (1978).
M.J. Bowden, Electron Irradiation of Polymers and its Application to Resists for Electron Beam Lithography, CRC ritical Reviews, Solid State Sciences 8 223–264, (1979).
M. Hatzakis, Electron Resists for Microcircuit and Mask Production, J. Electrochem Soc. 116, 1033-37, (1969). Also: R.A. Harris, Polymethyl Methacrylate as an Electron Sensitive Resist, J. Electrochem. Soc. 120, 270-274, (1974).
W.J. Daughton and F.L. Givens, An Investigation of the Thickness Variation of Spun-on Thin Films, J. Electrochem. Soc. 129, 173-179, (1982).
J.M. Shaw and M. Hatzakis, Developer Temperature Effects on e-beam and Optically Exposed Positive Photoresist, J. Electrochem, Soc. 1266, 2026–2031, (1979).
V.K. Sharma, R.A. Pethrick and S. Affrossman, Polymethyl methacrylate): Influence of Tacticity on its Use as an Electron Resist, Polymer 23, 1732–36, (1982).
J. S. Greeneich, Developer Characteristics of Poly (methyl Methacrylate) Electron Resist, J. Electrochem. Soc. 122, 970-976, (1975).
K. Harada, O. Kogure and K. Murase, Poly(Phenylmethacrylate-co-Methacrylic Acid) as a Dry-Etching Durable Positive Electron Resist, IEEE Trans. on Elect. Dev., ED-29, 518-524 (1982).
M.E. Mochel, C.J. Humphreys, J.A. Eades, J.M. Mochel and A.M. Petford, Electron Beam Writing on a 20 Scale in Metal-Aluminas, Appl. Phys. Lett. 42, 392–394, (1983).
T. Tamamura, K. Sukegawa and S. Sugaward, Resolution Limit of Negative Electron Resist Exposed on a Thin Film Substrate, J. Electrochem. Soc. 129, 1831–35, (1982).
B. Singh, S.P. Beaumont, P.G. Bower and C.D.W. Wilkinson, New Inorganic Electron Resist System for High Resolution Lithography, Appl. Phys. Lett. 41, 889–891, (1982).
J.M. Moran, High Resolution Resist Patterning Using Reactive Ion Etching Techniques, Solid State Technol. 24(4), 195–198, (1981).
M. Hatzakis, J. Paraszczak and J. Shaw, Double Layer Resist Systems for High Resolution Lithography, Proceedings of Microcircuit Engineering 81, Laussane, Switzerland, p.386-396.
S.P. Beaumont, T. Tamamura and C.D.W. Wilkinson, A Two-Layer Resist System for Efficient Lift-Off in Very High Resolution Electron Beam Lithography, Proc. Microcircuit Engineering, 381-388, Amsterdam, Delft University Press, (1981).
C.E. Binnie, S.P. Beaumont, C.D.W. Wilkinson and J.C. White, The Fabrication of Very Short Gate Length n-Channel Mosfet’s by Direction Electron Beam Exposure, Proc. Microcircuit Engineering 82, Grenoble, France, (1982).
L.D. Jackel, R.E. Howard, E.L. Hu, D.M. Tennant and P. Grabbe, 50nm Silicon Structures Fabricated with Tri-level Electron Beam Resist and Reactive-Ion Etching, Appl. Phys. Lett. 39, 268–270, (1981).
T.H.P. Chang, J.Vac.Sci. Technol. 12, 1271, (1975).
A. Broers, Resolution Limits of PMMA resist for Exposure with 50kV Electrons, J. Electrochem, Soc. 128, 166–1970, (1981).
S.A. Rishton, S.P. Beaumont and C.D.W. Wilkinson, Measurement of the Effect of Secondary Electrons on the Resolution Limit of PMMA, Proc. Microcircuit Engineering 82, Grenoble, (1982).
S.P. Beaumont, B. Singh and C.D.W. Wilkinson, Very high Resolution Electron Beam Lithography-thin films on solid substrates? Proc. 10th Electron and Ion Beam Sci. Technol. Conf., Montreal, Canada, (1982).
W.S. Mackie, S.P. Beaumont, C.D.W. Wilkinson and J.S. Roberts, High Resolution Lithography on Thin Active Semiconductor Membranes, Proc.10th Electron and Ion Beam Sci. Technol. Conf. Montreal, Canada (1982).
M.P. Lepselter and W.T. Lynch, Resolution Limitations for Sub-micron Technology in VSLI Electronics, ed. N.G. Einspruch, Academic Press, N.Y., 1981.
D.C. Flander, Replication of 175 Å Lines and Spaces in Polymethyl-methcrylate Using X-Ray Lithography, Appl. Phys. Lett. 36, 93–96, (1980).
S.P. Beaumont, P.G. Bower, T. Tamamura and C.C.W. Wilkinson, Replication of Very High Resolution e-beam Written Masks by Carbon k X-ray Contact Printing, Proc. Microcircuit Eng. 81, Lausanne, (1981).
R. Feder, E. Spiller and J. Topalian, Replication of 0.1 Micron Geometries with X-ray Lithography, J. Vac. Sci. Tech. 12, 1332–35 (1975).
B. Singh, S.P. Beaumont, A.Webb, P.A. Bower and C.D.W. Wilkinson High Resolution Patterning with Ag2S/As2S3 inorganic Electron Beam Resist and Reactive ion etching Proc. 11th Electron, Ion Photon Beam Sci. and Technology Conference, Los Angeles (1983).
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Wilkinson, C.D.W., Beaumont, S.P. (1988). Submicron Lithography. In: Grubin, H.L., Ferry, D.K., Jacoboni, C. (eds) The Physics of Submicron Semiconductor Devices. NATO ASI Series, vol 180. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2382-0_11
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