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Particle Beams

Sources, Optics, and Interactions

  • Chapter
The Physics of Micro/Nano-Fabrication

Part of the book series: Microdevices ((MDPF))

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Abstract

A key element in our ability to view, fabricate, and in some cases operate microdevices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. Consideration of diffraction effects leads to the general rule that if one wishes to focus a beam of particles into a spot of a given size, the wavelength associated with the particles should be smaller than the required spot diameter. In Table 2.1 are listed the wavelengths (in μm) of three particles (photons, electrons, and protons) at various energies.

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Brodie, I., Muray, J.J. (1992). Particle Beams. In: Brodie, I., Muray, J.J. (eds) The Physics of Micro/Nano-Fabrication. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-6775-9_2

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