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Particle Beams

Sources, Optics, and Interactions
  • Ivor Brodie
  • Julius J. Muray
Chapter
Part of the Microdevices book series (MDPF)

Abstract

A key element in our ability to view, fabricate, and in some cases operate microdevices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. Consideration of diffraction effects leads to the general rule that if one wishes to focus a beam of particles into a spot of a given size, the wavelength associated with the particles should be smaller than the required spot diameter. In Table 2.1 are listed the wavelengths (in μm) of three particles (photons, electrons, and protons) at various energies.

Keywords

Particle Beam Plasma Focus Target Atom Spherical Aberration Virtual Cathode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1992

Authors and Affiliations

  • Ivor Brodie
    • 1
  • Julius J. Muray
    • 1
  1. 1.SRI InternationalMenlo ParkUSA

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