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The Physics of Micro/Nano-Fabrication

  • Ivor Brodie
  • Julius J. Muray

Part of the Microdevices book series (MDPF)

Table of contents

  1. Front Matter
    Pages i-xix
  2. Ivor Brodie, Julius J. Muray
    Pages 1-53
  3. Ivor Brodie, Julius J. Muray
    Pages 55-257
  4. Ivor Brodie, Julius J. Muray
    Pages 259-314
  5. Ivor Brodie, Julius J. Muray
    Pages 315-451
  6. Ivor Brodie, Julius J. Muray
    Pages 453-547
  7. Ivor Brodie, Julius J. Muray
    Pages 549-582
  8. Ivor Brodie, Julius J. Muray
    Pages 583-615
  9. Back Matter
    Pages 617-650

About this book

Introduction

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Keywords

chemistry optics physics research

Editors and affiliations

  • Ivor Brodie
    • 1
  • Julius J. Muray
    • 1
  1. 1.SRI InternationalMenlo ParkUSA

Bibliographic information