Abstract
A theoretical method to derive the projected range distribution in a double-layer substrate such as a SiO2-Si substrate is presented. Validity of the analysis is checked by the C-V measurement. One of the conclusions by this analysis is that a discontinuity in the ion concentration generally exists at the interface of the layers.
Next, the optimum implant conditions to control the gate threshold voltage of MOSFET’s are theoretically predicted using the above analysis. Some of the optimum conditions show good agreement with what have been found empirically.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
M.R. MacPherson, Appl. Phys. Letters, 18, 502 (1971)
T. Warabisaco, I. Yoshida and T. Tokuyama, Proc. 4th Conf. Solid State Devices, Tokyo, Suppl. Japan Soc. Appl. Phys. 42, 181 (1973)
M. Kamoshida, Appl. Phys. Letters, 22, 404 (1973)
R. W. Bower, H.G. Dill, K.G. Aubuchon and S.T. Thompson, IEEE Trans. ED-15, 757 (1968)
I. Yoshida, T.Matsuhara, M.Kubo and T.Tokuyama, will be presented in 6th Conf. Solid State Devices, Tokyo, 1974 No.B-6(5)
P.J. Coppen, K.G. Aubuchon, L.O. Bauer and N.E. Moyer, Solid-State Electron. 15, 165 (1972)
S. Furukawa and H. Ishiwara, J. Appl. Phys. 42, 1268 (1972)
J. Lindhard, M. Scharff and H.E. Schiott, K. Danske Vidensk. Selsk. mat.-fys. Medd., 33, No.14 (1963)
J.L. Combasson, J. Bernard, G. Guernet and M. Bruel, Proc. 3rd Intern, Conf. Ion Implantation in Semiconductors and Other Materials, edited by B.L. Crowder (Plenum Press, New York, 1973) p.285
K. Nakamura and M. Kamoshida, Tech. Report of No.350 Appl. Electronics and Solid State Physics Meeting in Japan Soc. Appl. Phys. No.3 (1973)
R.B. Palmer, C.C. Mai and M. Hswe, J. Electrochem. Soc., Solid-State Sci. and Tech., 120, 999 (1973)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1975 Plenum Press, New York
About this chapter
Cite this chapter
Ishiwara, H., Furukawa, S., Yamada, J., Kawamura, M. (1975). Projected Range Distribution of Implanted Ions in a Double-Layer Substrate. In: Namba, S. (eds) Ion Implantation in Semiconductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-2151-4_53
Download citation
DOI: https://doi.org/10.1007/978-1-4684-2151-4_53
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-2153-8
Online ISBN: 978-1-4684-2151-4
eBook Packages: Springer Book Archive