Iron Surface Treatment by Boron Implantation

Abstract

As an application of ion implantation technique outside semiconductor fields, the technique may be useful for metal surface treatments. Because, the depth distribution of treated surface, dose of element, and selection of doping element can be easily controlled externally by changing the ion beam energy, current, and kinds of ions, respectively. Moreover, this technique has the potentiality in the fabrication of new metal compounds which cannot be expected under the conditions of the conventional thermal processing. As one of the application of surface treatment, surface hardening by boron has been studied. Some metallugical properties, wear properties, and magnetic properties of implanted substrates have been obtained.