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Non-Equilibrium Plasma Modeling

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Plasma Technology

Abstract

We present different examples of non-equilibrium plasma modeling interesting technological applications. In particular we discuss some aspects of plasma modeling in excimer lasers, negative ion sources, nitrogen afterglow and RF discharges emphasizing the theoretical common points linking different applications.

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References

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Authors and Affiliations

  1. Centro di Studio per la Chimica dei Plasmi del C. N. R. and Dipartimento di Chimica dell, Università di Bari, Italy

    M. Capitelli, R. Celiberto, G. Capriati, C. Gorse & S. Longo

Authors
  1. M. Capitelli
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  2. R. Celiberto
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  3. G. Capriati
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  4. C. Gorse
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  5. S. Longo
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Editor information

Editors and Affiliations

  1. Centro di Studio per la Chimica dei Plasmi del CNR, University of Bari, Bari, Italy

    Mario Capitelli  & Claudine Gorse  & 

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© 1992 Springer Science+Business Media New York

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Capitelli, M., Celiberto, R., Capriati, G., Gorse, C., Longo, S. (1992). Non-Equilibrium Plasma Modeling. In: Capitelli, M., Gorse, C. (eds) Plasma Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3400-6_5

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  • DOI: https://doi.org/10.1007/978-1-4615-3400-6_5

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6502-0

  • Online ISBN: 978-1-4615-3400-6

  • eBook Packages: Springer Book Archive

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