Abstract
This chapter discusses fiber optic and integrated optic sensor concepts. Force, displacement, and acceleration sensors are closely related. A displacement sensor may be used as a force sensor if we know precisely the mechanical constants of the sensor. A force sensor always implies displacement (even if this is not of interest and it may be extremely small). The relation between force and displacement in a force or displacement sensor depends on the sensor.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
C. Schonenberger and S. F. Alvarado, “A Differential Interferometer for Force Microscopy.” Rev. Sci. Instrum. Vol. 60 (10), p.p.3131–3134 (1989).
R. Erlandsson, G. M. McClelland, C. M. Mate and S. Chiang, “Atomic Force Microscopy sing Optical Interferometry.” J. Vac. Sci. Technol. A 6 (2), p.p.266–270 (1988).
Y. Martin, C. C. Williams and H. K. Wickramasinghe, “Atomic Force Microscope-Force Mapping and Profiling on a Sub 100-A Scale.” J. Appl. Phys. 61 (10), p.p.4723–4729 (1987).
R. M. DeLaRue, R. F. Humphryes, I. M. Mason and E. A. Ash Proc. IEEE 119, p. 117 (1972).
C. A. Putman, B. G. De Grooth, N. F. Van Hulst, and J. Greve, “A detailed analysis of the optical beam deflection technique for use in atomic force microscopy.” J. Appl. Phys. Vol. 72 (1), p.p. 6–12 (1992).
A. D. Kersey, F. Bucholtz, K. Sinansky and A. Dandridge, “Interferometric Sensors for DC Measurands-A new class of fiber sensors.” Fiber Optic and Laser Sensors IV, Ramon P. De Paula, Eric Udd, Editors, Proc. SPIE Vol. 718, p.p. 198--202 (1987).
N. Lagakos, and J. A. Bucaro, “Optimizing Fiber Optic Microbend Sensors.” Fiber Optic and Laser Sensors IV, Ramon P. De Paula, Eric Udd, Editors, Proc. SPIE Vol. 718, p.p. 12–20 (1987).
A. Garcia-Valenzuela, and M. Tabib-Azar, “Fiber Optic Force and Displacement Sensor based on Speckle Detection with 0.1 Nano-Newton and 0.1 Angstrom Resolution.” Sensors and Actuators A. Physical, Vol. 36 (3), p.p.199–208 (1993).
Ura, T. Suhara, and H. Nishiara, “Integrated-Optic interferometer Position Sensor”, Journal of Lightwave Technology, Vol. 7 (2), p.p.270–273 (1989).
K. T. V. Grattan, A. W. Palmer, D. P. S. Saini, “Fiber-optic Evanescent -Wave Coupling Force Transducer.” Proc. SPIE Vol. 586 Optic Sensors, p. 128 (1985).
Spillman Jr. W. and McMahon D.H., “Frustrated-Total Internal Reflection Multimode Fiber-Optic Hydrophone.” Appl. Opt. 20, p.p. 3600–3604 (1981)
M. Izutsu, A. Enokihara, and T. Sueta, “Optical-Waveguide Micro-Displacement Sensor.” Electron. Lett., Vol. 18 (20), p.p. 867–868 (1982).
S. Ura, T. Suhara, and H. Nishihara, “Integrated-Optic Interferometer Position Sensor.” Journal of Lightwave Technology, Vol. 7 (2), p.p. 270–273 (1989).
S. Valette, et al., “Silicon-Based Integrated Optics Technology for Optical Sensor Applications.” Sensors and Actuators, A21–A23, p.p. 1087–1091 (1990).
K. Fritsch and G. Beheim, “Wavelength-Division Multiplexed Digital Optical Position Transducer.” Opt. Lett., Vol. 11, p.p. 1–3 (1986).
R.D. Dechstedt and D.A. Jackson, “Performance Analysis of a Fiber Optic Accelerometer Based on a Compliant Cylinder Design.” Rev. Sci. Instrum. 66 (1), p.p.207–214 (1995).
F.A. Castro, S.R.M. Carneiro, O. Lisboa, and S.L.A. Carrara, “Two-Mode Optical Fiber Accelerometer.” Opt. Lett. 17 (20), p.p.1474–1475 (1992).
Masashi Okawa, Musayuhi Izutsu, and Tadasi Sueta, “Integrated Optic Accelerometer Employing a Cantilever on a Silicon Substrate.” Jap. J. Appl. Phys. 28(2), p.p.287–288, 1989.
K.E. Burcham, G.N. De Brabander, and J.T. Boyd, “Micromachined Silicon Cantilever Beam Accelerometer Incorporating an Integrated Optical Waveguide.” Integrated Optics and Microstructures, Proc. SPIE, Vol. 1793, p.p. 12–18, 1992.
U. Durig, D. W. Pohl, and F. Rohner, J. Appl. Phys. 59, pp. 3318 1986
R. C. Reddick, R. J. Warmack, D. W. Chilcott, S. L. Sharp, and T. L. Ferrell, “Photon Scanning Tunneling Microscopy.” Rev. Sci. Instrum. Vol. 61 (12), p.p.669–3677 (1990).
D. W. Pohl, W. Denk, and M. Lanz, “Optical Stethoscopy: Image Recording with Resolution V20.” Appl. Phys. Lett. Vol. 44 (7), p. 651 (1984).
W. Lukosz and P. Pliska, “Integrated optical interferometer as a ligth modulator and microphone.” Sensors and Actuators A, Vol. 25–25, p.p. 337–340 (1991).
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1995 Springer Science+Business Media New York
About this chapter
Cite this chapter
Garcia-Valenzuela, A., Tabib-Azar, M. (1995). Force, Displacement, and Acceleration Sensors. In: Integrated Optics, Microstructures, and Sensors. The Springer International Series in Engineering and Computer Science, vol 332. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2273-7_11
Download citation
DOI: https://doi.org/10.1007/978-1-4615-2273-7_11
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-7923-9621-5
Online ISBN: 978-1-4615-2273-7
eBook Packages: Springer Book Archive