Integrated Optics, Microstructures, and Sensors

  • Massood Tabib-Azar

Table of contents

  1. Front Matter
    Pages i-xxi
  2. Integrated Optics

    1. Front Matter
      Pages 1-4
    2. Meng-jen John Wu
      Pages 45-69
    3. M. Tabib-Azar
      Pages 71-97
    4. M. Tabib-Azar
      Pages 99-115
    5. Meng-jen John Wu
      Pages 117-141
  3. Microstructures and Fabrication Methods

    1. Front Matter
      Pages 143-146
    2. M. Tabib-Azar
      Pages 147-163
    3. M. Tabib-Azar
      Pages 165-192
  4. Optical Sensors

    1. Front Matter
      Pages 207-209
    2. A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 211-235
    3. A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 267-284
    4. Glenn Beheim
      Pages 285-313
    5. S. Amartur, A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 315-345
    6. Meng-jen John Wu, M. Tabib-Azar
      Pages 347-363
    7. A. Garcia-Valenzuela, M. Tabib-Azar
      Pages 365-392
  5. Back Matter
    Pages 393-399

About this book


Controlling the mechanical, electrical, magnetic, and optical properties of materials by advanced fabrication methods (Le. ; Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition) has become the new paradigm in our research era. Sensors, being the most vital part of the electronic data processing and decision making machines, stand to gain the most from engineering of the properties of materials. Microfabrication technology has already contributed significantly to the batch fabrication of micro-sensors with higher over all qualities compared to their counterparts that are fabricated using other methods. Batch fabrication of micro-sensors i) results in more uniform properties of co-fabricated devices, ii) nearly eliminates the need for characterization of individual sensors, and iii) eliminates a need for laborious alignment procedures. A less obvious benefit of using microfabrication methods is the possibility of precise control over the dimensions of the sensor. This control enables engineering of some of the properties of the material which affect the sensor's operation. There are many examples of this in the literature. Optical sensors are known to have superior properties over their counterparts that use other (i. e. ; electrostatic and magnetic) means of detection. To name a few, these advantages are: i) immunity to electromagnetic interferences, ii) higher sensitivities compared to the other types of sensors, iii) simplicity of operation principles, and iv) simplicity of overall construction.


Counter design electronics integrated optics interference material mechanics optical devices optical properties optics sensor

Authors and affiliations

  • Massood Tabib-Azar
    • 1
  1. 1.Case Western Reserve UniversityClevelandUSA

Bibliographic information

  • DOI
  • Copyright Information Kluwer Academic Publishers 1995
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-0-7923-9621-5
  • Online ISBN 978-1-4615-2273-7
  • Series Print ISSN 0893-3405
  • Buy this book on publisher's site