Abstract
We present a novel approach for the fabrication of terahertz (THz) metamaterial structures utilizing PolyMUMPs, a foundry process commonly used in the fabrication of microelectricalmechanical systems (MEMS) devices. The structure has an alternating composition consisting of three polysilicon layers and two silicon dioxide layers each with a unique thickness. A split ring resonator (SRR) structure was fabricated with dimensions to support resonance around 5 THz. The structures were arrayed to cover a 1 cm2 area. The backside of the samples was polished to improve the transmission characteristics of the material during Fourier transform spectroscopy measurements. The data indicates a transmission null around 3.7 THz due to the periodic arrangement of the SRR structures. These results are encouraging for future use of PolyMUMPs in terahertz metamaterial designs which is ideal for the repeatability the manufacturing process lends to the design.
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Smith, D.R., Padilla, W.J., Veir, D.C., Nemet-Nasser S. C., and Schultz, S. “Composite medium with SimultaneousNegative Permeability and Permittivity,” Physics Review Letters 84:4184-41-87, 2000.
Shelby, R.A., Smith, D. R., and Shultz S. “Experimental Verification of a Negative Index of Refraction,” Science292:77-79, 2001.
Pendry, J.B. “Negative Refraction Makes a Perfect Lens” Physics Review Letters 85:3966-3969, 2000[4] Schurig, D., Mock J.J., Justice, B.J., Cummer, S.A., Pendry J.B., Starr A.F., and Smith D.R. “MetamaterialElectromagnetic Cloak at Microwave Frequencies,” Science 314:977-980, 2006.
Pendry, J.B. “Negative Refraction Makes a Perfect Lens” Physics Review Letters 85:3966-3969, 2000[6] D.R. Smith, W.J. Padilla, D.C. Vier, S.C. Nemat-Nasser, and S. Schiltz, “Composite Medium with SimultaneouslyNegative Permeability and Permittivity,” Physics Review Letters 84 (18): 4184-4187 (2000).
Han, Jiaguang, Lakhtakia, Akhlesh, and Qui, Cheng-Wei. “Terahertz Metamaterials with Semiconductor Split-RingResonators for Magnetic Tunability,” Optical Society of America 2008.
Chen, Hou-Tong, O’Hara, John F., Taylor, Antoinette J., and Averitt, Richard D. “Complementary Planar TerahertzMetamaterials,” Optics Express 15(3), pp 1084-1095, 2007.
Peralta, Xomalin G., Smirnova, Evgenya I., Azad, Abil K., Chen, Hou-Tong, Taylor, Antoinette J., Brener, Igal, andO’Hara, John F. “Metamaterials for THz Polarimetric Devices,” Optical Society of America 17(2), pp 773-783,2009.
Tao, Hu, Padilla, Willie J., Zhang, Xin, and Averitt, Richard D. “Recent Progress in Electromagnetic MetamaterialDevices for Terahertz Applications,” IEEE Journal of Selected Topics in Quantum Mechanics, 2010.
Azad, A.K., Dai J., and Zhang, W. “Transmission Properties of Terahertz Pulses Through Subwavlength DoubleSplit Ring Resonators,” Optics Letters 31: 634-637, 2006.
Yen, T.J., Padilla, W.J., Fang N., Vier, D.C., Smith D.R., Pendry J.B., Basov D.N., and Zhnag X. “TerahertzMagnetic Response from Artificial Materials,” Science 303:1494-1496, 2004.
Driscoll, T., Andreev, G.O., Basov, D.N., Palit, S., Ren, T., Mock, J., Cho S.Y., Jockerst N.M., and Smith D.R.“Quantitative Investigation of a Terahertz Artificial Magnetic Resonance Using Oblique Angle Spectroscopy.”Applied Physics Letters 90:092508, 2007.
PolyMUMPs process, http://www.memscap.com/en_mumps.html
Azad, Abul K, Chen, H.T., Lu, X., Gu, J., Weisse-Bernstein, N.R., Akhodov, E., Taylor, A., Zhang, W., andO’Hara, J.F. “Flexible Quasi-Three-Dimensional Terahertz Electric Metamaterials,” Terahertz Science andTechnology 2(1):15-22, 2009.
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Moore, E.A., Langley, D., Coutu, R.A. (2011). Terahertz Metamaterial Structures Fabricated by PolyMUMPs. In: Proulx, T. (eds) MEMS and Nanotechnology, Volume 4. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-0210-7_21
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DOI: https://doi.org/10.1007/978-1-4614-0210-7_21
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