Abstract
The goal of surface-micromachining is miniature mechanical systems, so why are electrical components of interest?
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
C.T.-C. Nguyen, L.P.B. Katehi, and G.M. Rebeiz. Micromachined devices for wireless communications. Proceedings of the IEEE, 86(8):1756–1768, 1998.
C.T.-C. Nguyen and R.T. Howe. An integrated cmos micromechanical resonator high-q oscillator. IEEE Journal of Solid-State Circuits, 34(4):440–455, 1999.
D. Koester, A. Cowen, R. Mahadevan, M. Stonefield, and B. Hardy. PolyMUMPs Design Handbook. MEMSCAP, 2003.
V. Koeninger, H.H. Uchida, and E. Fromm. Degradation of gold-aluminium ball bonds by aging and contamination. IEEE Transactions on Components, Packaging, and Manufacturing Technology, Part A, 18(4):835–841, 1995.
T.C. Wei and A.R. Daud. The effects of aged cu-al intermetallics to electrical resistance in microelectronics packaging. Microelectronics International, 19(2):38–43, 2002.
B. Ziaie and K. Najafi. A generic micromachined silicon platform for high-performance rf passive components. Journal of Micromechanics and Microengineering, 10(3):365–371, 2000.
J.M. Rabaey, A. Chandrakasan, and Borivoje Nikolic, Digital Integrated Circuits: Second Edition. Prentice-Hall, Upper Saddle River, New Jersey, 2003.
S. Zappe, M. Baltzer, T. Kraus, and E. Obermeier. Electrostatically driven linear microactuators: Fe analysis and fabrication. Journal of Micromechanics and Microengineering, 7(3):204–209, 1997.
D.J. Young and B.E. Boser. A micromachined variable capacitor for monolithic lownoise vco’s. In Technical Digest 1996 Solid-State Sensor and Actuator Workshop, pages 86–89, 1996. Hilton Head Island, SC, June 3–6.
A.K. Chinthakindi, D. Bhusari, B.P. Dusch, J. Musolf, B.A. Willemsen, E. Prophet, M. Roberson, and P.A. Kohl. Electrostatic actuators with intrinsic stress gradient — i. materials and structures. Journal of the Electrochemical Society, 149(8):H139–H145, 2002.
J.Y.-C. Chang, A.A. Abidi, and M. Gaitan. Large suspended inductors on silicon and their use in a 2-µm cmos rf amplifier. IEEE Electron Device Letters, 14(5):246–248, 1993.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2004 Kluwer Academic Publishers
About this chapter
Cite this chapter
Johnstone, R.W., Parameswaran, M. (2004). Electrical Components. In: An Introduction to Surface-Micromachining. Springer, Boston, MA. https://doi.org/10.1007/978-1-4020-8021-0_9
Download citation
DOI: https://doi.org/10.1007/978-1-4020-8021-0_9
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-1077-9
Online ISBN: 978-1-4020-8021-0
eBook Packages: Springer Book Archive