An Introduction to Surface-Micromachining

  • Robert W. Johnstone
  • M. Parameswaran

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Introduction

    1. Robert W. Johnstone, M. Parameswaran
      Pages 1-5
  3. Fabrication

    1. Front Matter
      Pages 7-7
    2. Robert W. Johnstone, M. Parameswaran
      Pages 9-28
    3. Robert W. Johnstone, M. Parameswaran
      Pages 29-41
  4. Design

    1. Front Matter
      Pages 43-43
    2. Robert W. Johnstone, M. Parameswaran
      Pages 45-62
    3. Robert W. Johnstone, M. Parameswaran
      Pages 63-73
    4. Robert W. Johnstone, M. Parameswaran
      Pages 75-79
    5. Robert W. Johnstone, M. Parameswaran
      Pages 81-92
    6. Robert W. Johnstone, M. Parameswaran
      Pages 93-99
  5. Devices

    1. Front Matter
      Pages 101-101
    2. Robert W. Johnstone, M. Parameswaran
      Pages 103-113
    3. Robert W. Johnstone, M. Parameswaran
      Pages 115-134
    4. Robert W. Johnstone, M. Parameswaran
      Pages 135-152
    5. Robert W. Johnstone, M. Parameswaran
      Pages 153-164
    6. Robert W. Johnstone, M. Parameswaran
      Pages 165-173
  6. Processes

    1. Front Matter
      Pages 175-175
    2. Robert W. Johnstone, M. Parameswaran
      Pages 177-179
    3. Robert W. Johnstone, M. Parameswaran
      Pages 181-182

About this book

Introduction

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Keywords

LIGA Scratch Wafer design manufacturing mechanics modeling physics

Authors and affiliations

  • Robert W. Johnstone
    • 1
  • M. Parameswaran
    • 1
  1. 1.Engineering ScienceSimon Fraser UniversityCanada

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4020-8021-0
  • Copyright Information Springer-Verlag US 2004
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4757-1077-9
  • Online ISBN 978-1-4020-8021-0
  • About this book