Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Bochobza-Degani O et al. (2000) Design and noise consideration of an accelerometer employing modulated integrative optical sensing. Sensors and Actuators A 84: 53–64
Breng U et al. (1999) μCORS — a bulk micromechined gyroscope based on coupled resonators. Transducers ‘99: Proc of the 10th Int Conf on Solid-State Sensors and Actuators, Japan: 1570–1573
Bütefisch S et al. (2001) Micromechanical three-axial tactile force sensor for micromechanical characterisation. Microsystem Technologies 7: 171–174
Chin A et al. (1996) A novel processing technique for thin diaphragms. Micro System Technologies ‘96: Proc of the 5th Int Conf and Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 223–228
Collins SD, Gonzalez C, Smith RL (1997) Microfabrication creates mesoscopic optical systems. Laser Focus World: 187–191
Corman T, Enoksson P, Stemme G (1998) Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection. Sensors and Actuators A 66: 160–166
Dauderstädt UA, Sarro PM, French PJ (1998) Temperature dependence and drift of a thermal accelerometer. Sensors and Actuators A 66: 244–49
De BhailÃs D et al. (2000) Modelling and analysis of a magnetic microactuator. Sensors and Actuators 81: 285–289
DiLella D et al. (2000) A micromachined magnetic-field sensor based on an elctron tunneling displacement transducer. Sensors and Actuators 86: 8–20
Esashi M (1994) Encaspsulated micromechanical sensors. Microsystem Technologies 1: 2–9
Frühauf J et al. (1997) Konstruktionselemente der Silizium-Mikrosystemtechnik, Varianten ihrer ätztechnischen Herstellung und ihr rechnergestützter Entwurf. Final Report AIF—Project 9929B, Technische Universität Chemnitz
Frühauf J, Hannemann B (2000) Wet etching of undercut sidewalls in {001}-silicon. Sensors and Actuators 79: 55–63
Gärtner E, Frühauf J, Jänsch E (2001) Mounting of Si-chips with plastically bent cantilevers. Transducers ‘01: Proc of the 11th Int Conf on Solid-State Sensors and Actuators, Germany: 206–209
Gärtner E et al. (2003) Flexural solid hinges etched from silicon. Proc of the euspen Int Topical Conf, 1, Germany: 43–46
Gärtner E et al. (2003) Festkörpergelenkführungen aus Si mit bis zu ± 5 mm Hub. Proc of the 6{thth} Conf of Mikromechanik & Elektronik, Mikrosystemtechnik ‘03, Germany: 118–121
Geßner T et al. (1992) Mikromechanische Technologieentwicklung für kine-tische ensoren. Gerätetechnik und Mikrosystemtechnik, VDI-Berichte 960, VDI-Verlag, Düsseldorf: 423–440
Geßner T, Vetter E, Wiemer M (1994) Technology tools for a high precision accelerometer in bulk micromechanics. Microsystem Technologies 1: 10–13
Gonzalez A, Collins SD (1997) Magnetically actuated fibre-optic switch with micromachined positioning stages. Optics Letters 22,10: 709–711
Gonzalez C et al. (1997) Microjoinery for optomechanical systems. Miniaturized Systems with Micro-Optics and Micromechanics II. Proc of SPIE, 3008, USA: 171–178
González C et al. (1998) Micro Joinery: concept, definition and application to microsystem development. Sensors and Actuators A 66: 315–332
Götz A, Campabadal F, Cané C (1998) Improvement of pressure-sensor performance and process robustness through reinforcement of the membrane edges. Sensors and Actuators A 67: 138–141
Hannemann B, Frühauf J (1998) New and extended possibilities of orientation dependent etching in microtechniques. IEEE, MEMS ‘98: Proc of the 11th Annual International Workshop on Micro Electro Mechanical Systems, Germany: 234–239
Hanf M et al. (2002) Realization of electrostatically driven actuators using curved electrodes fabricated by using silicon bulk micromachining techniques. Actuator 2002: Proc of the Int Conf on new Actuators, Germany: 329–332
Hashimoto M et al. (1994) Silicon angular rate sensor using electromagnetic excitation and capacitive detection. Micro System Technologies ‘94: Proc of the 4th Int Conf & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 763–771
Hermes T et al. (1996) A micro mechanical system for liquid dosage and nebulization. Micro System Technologies ‘96: Proc of the 5th Int Conf & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 187–192
Hiller K (1998) A new bulk micromachined gyroscope with vibration enhancement by coupled resonators. Micro System Technologies ‘98: Proc of the 6th Int Conf & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 115–120
Horie M, Funabashi H, Ikegami K (1995) A study on micro force sensors for micro handling systems. Microsystem Technologies 1: 105–110
Iosub R, Moldovan C, Modreanu M (2002) Silicon membranes fabrication by wet anisotropic etching. Sensors and Actuators A 99: 104–111
Kabir AE et al. (1999) High sensitivity acoustic transducers with thin p+ membranes and gold back-plate. Sensors and Actuators 78: 138–142
Krause W (1993) Konstruktionselemente der Feinmechanik. Carl Hanser Verlag, München Wien
Kurth S et al. (2001) A new vacuumfriction gauge based on a Si tuning fork. Transducer ‘01: Proc of the 11th Int Conf on Solid-State Sensors and Actuators, Germany: 502–505
Kwon K, Park S (1998) A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer. Sensors and Actuators A 66: 250–255
Lapadatu D et al. (1998) A model for the etch-stop location on reverse-biased pn junctions. Sensors and Actuators A 66: 259–267
Manea E, Müller R, Popescu A (1999) Some particular aspects of the thin membrane by boron diffusion processes. Sensors and Actuators A 74: 91–94
Markert J et al. (1992) Elektrostatischer Mikroaktor. Gerätetechnik und Mikrosystemtechnik, VDI-Berichte 960, VDI-Verlag, Düsseldorf
Matsunaga T, Minami K, Esashi M (1999) Acceleration switch with extended holding time using the squeeze film effect. Transducers ‘99: Proc of the 10th Int Conf on Solid-State Sensors and Actuators, Japan: 1550–1553
Mineta T et al. (1999) Piezoresistive micro accelerometer for high g shock using air damping effect. Transducers ‘99: Proc of the 10th Int Conf on Solid-State Sensors and Actuators: 1530–1533
Nguyen NT et al. (1998) Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor. Sensors and Actuators A 69: 85–91
Offereins HL, Sandmaier H (1990) Stressfreie Chipmontage. Mikroelektronik, Heft 1, VDE-Verlag
Oosterbroek RE et al. (1999) A micromachined pressure/flow sensor. Sensors and Actuators 77: 167–177
Oosterbroek RE et al. (1999) Characterization and optimization of monocrystalline in-plane operating check valves. Transducers ‘99: Proc of the 10th Int Conf on Solid-State Sensors and Actuators, Japan: 1816–1819
Puers R, Reyntjens S (2001) Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD. Sensors and Actuators A 92: 249–256
Roßberg R, Schmidt B, Büttgenbach S (1995) Micro liquid dosing system. Microsystem Technologies 2/1: 11–16
Schäfer A (1992) Kapazitiver mikromechanischer Beschleunigungssensor auf Basis eines schneidengelagerten Drehpendels. Dissertation Thesis, Technische Universität Chemnitz
Schlaak H et al. (1996) Silicon-microrelay with electrostatic moving wedge actuator — new functions and miniaturisation by micromechanics. Micro System Technologies ‘96: Proc of the 5th Int Conf & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 463–468
Schmiedel R (2002) Technologieentwicklung für einen neuartigen kapazitiven Beschleunigungssensor. Diploma Thesis, Technische Universität Chemnitz
Schröpfer G, de Labachelerie M, Ansel Y (1998) Investigations concerning the mechanical and capacitive sensitivity of lateral bulk accelerometers. MME ‘98: Proc of the 9th Micromechanics Europe Workshop, Norway: 295–298
Schröpfer G et al. (1998) Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation. Sensors and Actuators A 68: 344–349
Shikida M et al. (2003) Active tactils sensor for detecting contact force and hardness of an object. Sensors and Actuators A 103: 213–218
Szita R et al. (2001) A micropipettor with integrated sensors. Sensors and Actuators A 89: 112–118
Vujanic A et al. (1996) Small torque measurements using micromachined sislicon cross-spring structure. Micro System Technologies ‘96: Proc of the 5th Int Conf & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, Germany: 261–266
Weidner J (1997) Untersuchungen zur Übertragbarkeit von Gestaltungsprinzipien der Feinwerktechnik auf Funktionselemente der Mikromechanik. Diploma Thesis, Technische Universität Chemnitz
Wibbeler J, Pfeifer G, Hietschold M (1998) Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS). Sensors and Actuators A 71: 74–80
Xinxin L, Minhang B (2001) Micromachining of multi-thickness sensor-array structures with dual eching technology. J Micromech Microeng 11: 239–244
Rights and permissions
Copyright information
© 2005 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
(2005). Elements for Mechanical Applications. In: Shape and Functional Elements of the Bulk Silicon Microtechnique. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26876-6_6
Download citation
DOI: https://doi.org/10.1007/3-540-26876-6_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-22109-8
Online ISBN: 978-3-540-26876-5
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)