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Tomography Using the Transmission Electron Microscope

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Handbook of Microscopy for Nanotechnology

6. Conclusions

It is evident that electron tomography offers a means to determine the three dimensional structure and composition of many different mateials at the nanometre level. In general, tomography using BF TEM for materials science applications will not yield true reconstructions because of the coherent nature of the scattering process seen in such images. BF images contain contrast that does not satisfy the projection requirement for tomography. Incoherent signals, such as those used to form STEM HAADF images or core-loss EFTEM images do satisfy the projection requirement, at least within certain limits. Further, by using these imaging techniques, it is possible to simultaneously record three-dimensional compositional information, either indirectly through the atomic number dependence of HAADF imaging or directly, by choosing a window that corresponds to a energy loss (electronic transition) within a particular atomic species. This one-to-one correspondence of structure and composition in three dimensions should give the physical scientist a very powerful method to analyse nanoscale structures and devices in the future.

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  1. Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK

    P. A. Midgley

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  1. Princeton University, Princeton, NJ, USA

    Nan Yao

  2. Georgia Institute of Technology, Atlanta, GA, USA

    Zhong Lin Wang

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Midgley, P.A. (2005). Tomography Using the Transmission Electron Microscope. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_19

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