Overview
- State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies
- The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies
- Broad coverage from technology fundamentals all the way to device applications
- Includes supplementary material: sn.pub/extras
Part of the book series: NATO Science for Peace and Security Series B: Physics and Biophysics (NAPSB)
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Keywords
Table of contents (24 papers)
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MEMS/NEMS Technologies and Applications
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MEMS Device and Reliability Physics
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Advanced Processes and Materials
Editors and Affiliations
Bibliographic Information
Book Title: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Editors: Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
Series Title: NATO Science for Peace and Security Series B: Physics and Biophysics
DOI: https://doi.org/10.1007/978-90-481-3807-4
Publisher: Springer Dordrecht
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer Science+Business Media B.V. 2010
Hardcover ISBN: 978-90-481-3805-0Published: 15 March 2010
Softcover ISBN: 978-90-481-3806-7Published: 30 June 2010
eBook ISBN: 978-90-481-3807-4Published: 03 March 2010
Series ISSN: 1874-6500
Series E-ISSN: 1874-6535
Edition Number: 1
Number of Pages: XI, 314
Topics: Metallic Materials, Control, Robotics, Mechatronics, Electronics and Microelectronics, Instrumentation, Microengineering, Nanotechnology and Microengineering, Classical Mechanics