Overview
- Von der Physik zum Chip - die Welt der Mikroelektronik präzise und verständlich dargestellt
Part of the book series: Teubner Studienbücher Physik (TSBP)
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Table of contents (8 chapters)
About the authors
Dr. Tim Schönauer, Infineon Technologies AG
Bibliographic Information
Book Title: Silizium-Planartechnologie
Book Subtitle: Grundprozesse, Physik und Bauelemente
Authors: Hans-Günther Wagemann, Tim Schönauer
Series Title: Teubner Studienbücher Physik
DOI: https://doi.org/10.1007/978-3-322-80070-1
Publisher: Vieweg+Teubner Verlag Wiesbaden
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eBook Packages: Springer Book Archive
Copyright Information: B. G. Teubner Verlag / GWV Fachverlage GmbH, Wiesbaden 2003
Softcover ISBN: 978-3-519-00467-7Published: 30 October 2003
eBook ISBN: 978-3-322-80070-1Published: 08 March 2013
Series ISSN: 1615-3766
Edition Number: 1
Number of Pages: XVIII, 212
Number of Illustrations: 38 b/w illustrations
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Semiconductors, Physics, general