Abstract
In this study, we investigate the morphological effect of solution-processed indium-zinc-oxide (InZnO) active layers on the electrical stability of InZnO thin-film transistors (TFTs). We first observe that in the spin-coating method, precursor agglomerates and aggregates remain on the substrates after spin coating an InZnO solution at a low spin speed, thereby causing particle-type morphological defects in the InZnO films. The morphological defects are proven to degrade the basic performance parameters of the InZnO TFTs, including the electrical current level, field-effect mobility, and threshold voltage. In addition, devices having morphological defects show a relatively large hysteresis in transfer characteristics compared to those without defects. In a test of the electrical stability over time, we determine that particle-type morphological defects cause a rapid increase in the conductivity of the InZnO films, which affects the variations in the saturation drain current and the threshold voltage.
Similar content being viewed by others
References
A. Janotti and C. G. Van de Walle, Rep. Prog. Phys. 72, 126501 (2009).
D. C. Look, Mater. Sci. Eng. B 80, 383 (2001).
Ü. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doğan, V. Avrutin, S. J. Cho and H. Morkoç, J. Appl. Phys. 98, 041301 (2005).
C. Soci, A. Zhang, B. Xiang, S. A. Dayeh, D. P. R. Aplin, J. Park, X. Y. Bao, Y. H. Lo and D. Wang, Nano Lett. 7, 1003 (2007).
Z. L. Wang and J. Song, Science 312, 242 (2006).
O. Gencylmaz, S. Karakaya, F. Atay, O. Ozbas and I. Akyuz, AIP Conf. Proc. 1476, 216 (2012).
T. Ivanova, A. Harizanova, T. Koutzarova and B. Vertruyen, Mater. Lett. 64, 1147 (2010).
G. H. Kim, B. D. Ahn, H. S. Shin, W. H. Jeong, H. J. Kim and H. J. Kim, Appl. Phys. Lett. 94, 233501 (2009).
M. Fujii, Y. Ishikawa, R. Ishihara, J. V. D. Cingel, M. R. T. Mofrad, M. Horita and Y. Uraoka, Appl. Phys. Lett. 102, 122107 (2013).
S. Han, J. Y. Choi and S. Y. Lee, Trans. Electr. Electron. Mater. 16, 62 (2015).
J. S. Seo, J. H. Jeon, Y. H. Hwang, H. Park, M. Ryu, S. H. K. Park and B. S. Bae, Sci. Rep. 3, 2085 (2013).
L. R. Zhang, C. Y. Huang, G. M. Li, L. Zhou, W. J. Wu, M. Xu, L. Wang, H. L. Ning, R. H. Yao and J. B. Peng, IEEE Trans. Electron Dev. 63, 1779 (2016).
Y. H. Hwang, S. J. Seo. and B. S. Bae, J. Mater. Res. 25, 695 (2010).
C. J. Lawrence and W. Zhou, J. Non-Newton. Fluid 39, 137 (1991).
C. D. Dimitrakopoulos and D. J. Mascaro, IBM J. Res. Dev. 45, 11 (2001).
X. Zhang, J. P. Ndabakuranye, D. W. Kim, J. S. Choi. and Jaehoon Park, Electron. Mater. Lett. 11, 964 (2015).
C. G. Van de Walle, Phys. Rev. Lett. 85, 1012 (2000).
E. Traversa and Andrea Bearzotti, Sensor. Actuat. B 23, 181 (1995).
P. K. Nayak, J. Jang, C. Lee and Y. Hong, Appl. Phys. Lett. 95, 193503 (2009).
Author information
Authors and Affiliations
Corresponding author
Additional information
These authors contributed equally to this work.
Rights and permissions
About this article
Cite this article
Lee, H., Jyothi, C., Baang, S. et al. Influence of structural defects in solution-processed InZnO semiconductors on the electrical stability of thin-film transistors. Journal of the Korean Physical Society 69, 1688–1693 (2016). https://doi.org/10.3938/jkps.69.1688
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3938/jkps.69.1688