Abstract
Ultrathin doped layers, known as delta-doped layers, were introduced within the intrinsic amorphous silicon (a-Si) active layer to fabricate hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs) with enhanced field-effect mobility. The performance of the delta-doped a-Si:H TFTs depended on the phosphine (PH3) flow rate and the distance from the n+ a-Si to the deltadoping layer. The delta-doped a-Si:H TFTs fabricated using a commercial manufacturing process exhibited an enhanced field-effect mobility of approximately ∼0.23 cm2/Vs (compared to a conventional a-Si:H TFT with 0.15 cm2/Vs) and a desirable stability under a bias-temperature stress test.
Similar content being viewed by others
References
R. A. Street, Technology and Applications of Amorphous Silicon (Springer, New York, 2000).
J. Kanicki, Amorphous and Microcrystalline Semiconductor Device: Optoelectronic Devices (Artech House, Boston, 1991).
M. Akiyama, M. Dohjo, T. Higuchi, H. Toeda, K. Suzuki, T. Aoki and Y. Oana, in Proceedings of the 6th International Display Research Conference (Tokyo, Japan, September 30–October 2, 1986), p. 212.
H. Lebrun, T. Kretz, J. Magarino and N. Szydlo, in SID International Symposium Digest of Technical Papers (Boston, Massachusetts, May 24–27, 2005), Vol. 36, p. 950.
K. C. Chun, J. H. Woo, D. S. Jung, M. G. Park, H. Kim, B. H. Lim, S. J. Yu, in SID International Symposium Digest of Technical Papers (Santa Anaheim, CA, USA, May 17–22, 2008), Vol. 39, p. 1482.
M. J. Powell, IEEE Trans. Electron Devices 36, 2753 (1989).
R. A. street and M. J. Thompson, Appl. Phys. Lett. 45, 769 (1984).
M. Ando, M. Wakagi and T. Minerura, Jpn. J. Appl. Phys. 37, 3904 (1998).
L. Han, P. Mandlik, K. H. Cherenack and S. Wagner, Appl. Phys. Lett. 94, 162105 (2009).
F. Richou, F. Morin, M. Le Contellec and A. Prolonge, in SID International Symposium Digest of Technical Papers (Boston, Massachusetts, May 17–22, 1992), Vol. 23, p. 619.
E. F. Schubert, Delta-doping of Semiconductors (Cambridge University Press, Cambridge, 1996).
W. B. Jackson, R. J. Nemanich, M. J. Thompson and B. Wacker, Phys. Rev. B 33, 6936 (1986).
A. Yoshida, K. Setsune and T. Hirao, Appl. Phys. Lett. 51, 253 (1987).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kim, P., Lee, K.M., Lee, EW. et al. A delta-doped amorphous silicon thin-film transistor with high mobility and stability. Journal of the Korean Physical Society 61, 1835–1839 (2012). https://doi.org/10.3938/jkps.61.1835
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3938/jkps.61.1835