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Development and application of an AFM probe soft approach method

  • Proceedings of the XXIV Russian Conference on Electron Microscopy (SEM-2012)
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The soft approach of an AFM probe to a sample’s surface is examined. Our method allows the approach of extremely fragile probes and differs advantageously from other known methods in its much lower degree of impact on the sample. At the same time, the proposed method is not much slower than the fastest available methods. Corresponding experimental results are presented.

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References

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Correspondence to I. M. Malovichko.

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Original Russian Text © I.M. Malovichko, 2013, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2013, Vol. 77, No. 8, pp. 1070–1072.

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Malovichko, I.M. Development and application of an AFM probe soft approach method. Bull. Russ. Acad. Sci. Phys. 77, 969–971 (2013). https://doi.org/10.3103/S1062873813080236

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  • DOI: https://doi.org/10.3103/S1062873813080236

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