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A technological complex for manufacturing of precise imaging optics

  • Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2010”
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A comprehensive approach to solving the problem of creating supersmooth optical surfaces with subnanometer accuracy is described. In this work, we create a production process that includes the certification of optical elements, finishing shapes to the required parameters while preserving the atomic smoothness of the surface, and the deposition of multilayered reflecting coverings with internal stresses compensated for.

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References

  1. Otaki, K., Ota, K., Nishiyama, I., et al., J. Vac. Sci. Technol. B, 2002, vol. 20, no. 6, p. 2449.

    Article  Google Scholar 

  2. Chkhalo, N.I., Dorofeev, I.A., Salashchenko, N.N., and Toropov, M.N., Proc. SPIE, 2008, vol. 7025, p. 702507.

    Article  Google Scholar 

  3. Chason, E. and Mayer, T.M., Appl. Phys. Lett., 1993, vol. 62, no. 4, p. 363.

    Article  ADS  Google Scholar 

  4. Chkhalo, N.I., Klimov, A.Yu., et al., Rev. Sci. Instrum., 2008, vol. 79, p. 033107.

    Article  ADS  Google Scholar 

  5. Klyuenkov, E.B., Pestov, A.E., et al., Ross. Nanotekhnol., 2008, vol. 3, nos. 9–10, pp. 90–98.

    Google Scholar 

  6. Andreev, S.S., Klyuenkov, E.B., Mizinov, A.L., et al., Poverkhn., 2005, no. 2, pp. 45–48.

  7. Vainer, Yu.A., Zorina, M.V., Pestov, A.E., et al., Materialy simpoziuma “Nanofizika i nanoelektronika” (Proc. Symp. “Nanophysics and Nanoelectronics”), Nizhni Novgorod: IFM RAN, 2010, vol. 1, pp. 210–211.

    Google Scholar 

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Authors and Affiliations

  1. Institute for the Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia

    S. Yu. Zuev, E. B. Kluenkov, A. E. Pestov, V. N. Poikovnikov, N. N. Salashchenko, L. A. Suslov, M. N. Toropov & N. I. Chkhalo

Authors
  1. S. Yu. Zuev
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  2. E. B. Kluenkov
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  3. A. E. Pestov
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  4. V. N. Poikovnikov
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  5. N. N. Salashchenko
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  6. L. A. Suslov
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  7. M. N. Toropov
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  8. N. I. Chkhalo
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Corresponding author

Correspondence to A. E. Pestov.

Additional information

Original Russian Text © S.Yu. Zuev, E.B. Kluenkov, A.E. Pestov, V.N. Poikovnikov, N.N. Salashchenko, L.A. Suslov, M.N. Toropov, and N.I. Chkhalo, 2011, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2011, Vol. 75, No. 1, pp. 57–60.

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Zuev, S.Y., Kluenkov, E.B., Pestov, A.E. et al. A technological complex for manufacturing of precise imaging optics. Bull. Russ. Acad. Sci. Phys. 75, 53–56 (2011). https://doi.org/10.3103/S1062873811010291

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  • DOI: https://doi.org/10.3103/S1062873811010291

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