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Errors in measuring the linear sizes of structures when detecting backscattered electrons in an SEM

  • Proceedings of the XVI Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation in Solid States Physics “SEM-2010”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The determining of element width and localization of the edge of nanostructures from the intensity of backscattered electron signal using nonreference measurement methods is discussed.

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References

  1. Kaz’miruk, V.V., Savitskaya, T.N., Stepanov, I.S., and Firsova, A.A., Izv. Akad. Nauk SSSR, Ser. Fiz., 1990, vol. 54, p. 227.

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Author information

Authors and Affiliations

  1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    V. V. Kaz’miruk & T. N. Savitskaya

Authors
  1. V. V. Kaz’miruk
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  2. T. N. Savitskaya
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Corresponding author

Correspondence to V. V. Kaz’miruk.

Additional information

Original Russian Text © V.V. Kaz’miruk, T.N. Savitskaya, 2010, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2010, Vol. 74, No. 7, pp. 1029–1031.

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Kaz’miruk, V.V., Savitskaya, T.N. Errors in measuring the linear sizes of structures when detecting backscattered electrons in an SEM. Bull. Russ. Acad. Sci. Phys. 74, 988–990 (2010). https://doi.org/10.3103/S1062873810070208

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  • DOI: https://doi.org/10.3103/S1062873810070208

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