Abstract
Quantum-chemical simulation of adsorption and migration of B+ ions on a SiO2/Si(100) interface has been performed. The dependences of the total energy of the cluster-B+ ion system on the reaction coordinate and geometric and electronic characteristics of the equilibrium states of a cluster with an adsorbed boron ion have been calculated.
Similar content being viewed by others
References
Morgan, A.M., Chen, T.-Y.J., Reed, D.A., and Baker, J.E., J. Vac. Sci. Technol., A, 1984, vol. 2/3, p. 1266.
Furuhashi, M., Hirose, T., Tsuji, H., and Tachi, M., IEICE Electron. Express, 2004, vol. 1/6, p. 126.
Otani, M., Shiraishi, K., and Osliyama, A., Phys. Rev. B: Condens. Matter Mater. Phys., 2003, vol. 68/18, 184 112-1.
Yanovskii, A. and Kolomoets, S., Poverkhnost, 1997, no. 11, p. 36.
Baraban, A.P., Bulavinov, V.V., and Konorov, P.P., Elektronika sloev SiO 2 na kremnii (Electronics of SiO2 Layers on Silicon), Leningrad: Leningr. Gos. Univ., 1988.
Kiselev, V.F., Kozlov, S.N., and Zoteev, A.V., Osnovy fiziki poverkhnosti tverdogo tela (Fundamentals of Solid Surface Physics), Moscow: Mosk. Gos. Univ., 1999.
Bongiorno, A., Simulation of Atomistic Processes During Silicon Oxidation, Thesis of PhD degree, Lausanne: EPFL, 2003.
Zavodinskii, V.G., Fiz. Tekh. Poluprovodn. (St. Petersburg), 2000, vol. 34, no. 3, p. 302 [Semiconductors (Engl. Transl.), vol. 34, no. 3, p. 296].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © O.Yu. Anan’yina, A.S. Yanovs’ky, 2008, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2008, Vol. 72, No. 5, pp. 628–631.
About this article
Cite this article
Anan’yina, O.Y., Yanovs’ky, A.S. Quantum-chemical simulation of adsorption of B+ ions on a SiO2/Si(100) interface. Bull. Russ. Acad. Sci. Phys. 72, 592–595 (2008). https://doi.org/10.3103/S1062873808050055
Published:
Issue Date:
DOI: https://doi.org/10.3103/S1062873808050055