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A Technique for Measurement of Insulating Powder Specimens by Secondary Ion Mass Spectrometry

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Abstract

This paper reports a technique for the measurement of insulators by secondary ion mass spectrometry (SIMS). An insulating specimen buried in a circular hole on a conducting disk was measured by using a standard Cameca IMS-3F ion microscope under the normal working conditions with a negatively charged oxygen primary beam. The technique is simple and allows the drastic increase of secondary ion intensity up to three orders of magnitude compared to a conventional specimen mounting. Reproducibility of secondary ion intensity was satisfactory for quantitative analysis.

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Authors and Affiliations

  1. Government Industrial Research Institute, Nagoya, Hirate-cho, Nagoya, 462, Japan

    Hisashi Morikawa, Yoshinori Uwamino & Toshio Ishizuka

Authors
  1. Hisashi Morikawa
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  2. Yoshinori Uwamino
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  3. Toshio Ishizuka
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Morikawa, H., Uwamino, Y. & Ishizuka, T. A Technique for Measurement of Insulating Powder Specimens by Secondary Ion Mass Spectrometry. ANAL. SCI. 7, 779–783 (1991). https://doi.org/10.2116/analsci.7.779

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  • DOI: https://doi.org/10.2116/analsci.7.779

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