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Direct-Writing of Three-Dimensional Structures Using Laser-Based Processes

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Abstract

Three-dimensional structures of selected materials can be written directly to the precise locations required using laser exposure of suitable gaseous precursor mixtures. Writing speeds exceeding 50 μm/s can be achieved. Examples presented in this work include the creation of a tiny time-of-flight laser ionization mass spectrometer, laserdriven movable micro-objects, and an ac electric-field microcage for storage, handling, and transferring small neutral objects in aqueous solution. The impact for lasercontrolled site-selective growth of carbon nanotube cables is demonstrated.

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Authors
  1. M. Stuke
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  2. K. Mueller
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  3. T. Mueller
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  4. K. Williams
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  5. R. Oliver
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  6. D.A.A. Ohlberg
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  7. G. Fuhr
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  8. R. S. Williams
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Stuke, M., Mueller, K., Mueller, T. et al. Direct-Writing of Three-Dimensional Structures Using Laser-Based Processes. MRS Bulletin 32, 32–39 (2007). https://doi.org/10.1557/mrs2007.12

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