Skip to main content
SpringerLink
Log in

Dynamic Studies of Semiconductor Growth Processes Using In Situ Electron Microscopy

  • Published:
MRS Bulletin Aims and scope Submit manuscript

Abstract

The following is an edited transcript from the 2000 MRS Outstanding Young Investigator presentation given by Frances M. Ross at the 2000 Materials Research Society Spring Meeting in San Francisco. Ross was cited for her “innovative and powerful experimental studies, based upon development of novel in situ electron microscopy techniques, that have provided fundamental new understanding of nucleation, growth, oxidation, and etching processes in a wide range of materials systems.” AWebcast of Ross’ presentation in Real Media format can be viewed via the MRSWeb site, www.mrs.org/multimedia/spring2000/.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Hammar, F. Le Goues, J. Tersoff, M.C. Reuter, and R.M. Tromp, Surf. Sci. 349 (1995) p. 129.

    Article  Google Scholar 

  2. F.M. Ross, F.K. LeGoues, J. Tersoff, R.M. Tromp, and M.C. Reuter, Microsc. Res. Tech. 42 (1998) p. 281.

    Article  CAS  Google Scholar 

  3. M.L. McDonald, J.M. Gibson, and F.C. Unterwald, Rev. Sci. Instrum. 60 (1989) p. 700.

    Article  Google Scholar 

  4. R.M. Tromp, M. Mankos, M.C. Reuter, A.W. Ellis, and M. Copel, Surf. Rev. Lett. 5 (1998) p. 1189.

    Article  CAS  Google Scholar 

  5. D. Cherns, Philos. Mag. 30 (1974) p. 549.

    Article  CAS  Google Scholar 

  6. J. Lander and J. Morrison, J. Appl. Phys. 33 (1962) p. 2089.

    Article  CAS  Google Scholar 

  7. F. Smith and G. Ghidini, J. Electrochem. Soc. 129 (1982) p. 1300.

    Article  CAS  Google Scholar 

  8. F.M. Ross and J.M. Gibson, Phys. Rev. Lett. 68 (1992) p. 1782.

    Article  CAS  Google Scholar 

  9. F.M. Ross, J.M. Gibson, and R.D. Twesten, Surf. Sci. 310 (1994) p. 243.

    Article  CAS  Google Scholar 

  10. K. Ohishi and T. Hattori, Jpn. J. Appl. Phys., Part 2: Lett. 33 (1994) p. L675.

    Article  CAS  Google Scholar 

  11. H. Nohira, H. Sekikawa, M. Matsuda, and T. Hattori, Appl. Surf. Sci. 104/105 (1996) p. 359.

    Article  CAS  Google Scholar 

  12. H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, and K. Terakura, Phys. Rev. Lett. 80 (1998) p. 345.

    Article  CAS  Google Scholar 

  13. N. Miyata, H. Watanabe, and M. Ichikawa, Phys. Rev. B 58 (1998) p. 13670.

    Article  CAS  Google Scholar 

  14. N. Miyata, H. Watanabe, and M. Ichikawa, Appl. Phys. Lett. 72 (1998) p. 1715.

    Article  CAS  Google Scholar 

  15. A.C. Oliver and J.M. Blakely, in Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures, edited by D.A. Buchanan, A.H. Edwards, H.J. von Bardeleben, and T. Hattori (Mater. Res. Soc. Symp. Proc. 592, Warrendale, PA, 2000) p. 45.

    CAS  Google Scholar 

  16. For example, see N.F. Mott, Philos. Mag. B 55 (1987) p. 117.

    Article  CAS  Google Scholar 

  17. F.M. Ross, J. Tersoff, R.M. Tromp, M. Reuter, and P.A. Bennett, J. Electron Microsc. 48 (1999) p. 1059.

    Google Scholar 

  18. F.M. Ross, IBM J. Res. Dev. 44 (2000) p. 489.

    Article  CAS  Google Scholar 

  19. C.W.T. Bulle-Lieuwma, D.E.W. Vandenhoudt, J. Henz, N. Onda, and H. von Kanel, J. Appl. Phys. 73 (1993) p. 3220.

    Article  CAS  Google Scholar 

  20. C. Cabral Jr., L.A. Clevenger, J.M.E. Harper, d’F.M. Heurle, R.A. Roy, C. Lavoie, K.L. Saenger, G.L. Miles, R.W. Mann, and J.S. Nakos, Appl. Phys. Lett. 71 (1997) p. 3531.

    Article  CAS  Google Scholar 

  21. Materials Research Society Spring 2000 Meeting WebCasts Home Page, http://www.mrs.org/ multimedia/spring2000/ (accessed November 2000).

  22. T.I. Kamins, E.C. Carr, R.S. Williams, and S.J. Rosner, J. Appl. Phys. 81 (1997) p. 211.

    Article  CAS  Google Scholar 

  23. G. Medeiros-Ribiero, A.M. Bratkovsky, T.I. Kamins, D.A.A. Ohlberg, and R.S. Williams, Science 279 (1998) p. 353.

    Article  Google Scholar 

  24. F.M. Ross, J. Tersoff, and R.M. Tromp, Phys. Rev. Lett. 80 (1998) p. 984.

    Article  CAS  Google Scholar 

  25. F.M. Ross, R.M. Tromp, and M.C. Reuter, Science 286 (1999) p. 1931.

    Article  CAS  Google Scholar 

  26. F.M. Ross, P.A. Bennett, R.M. Tromp, J. Tersoff, and M. Reuter, Micron 30 (1999) p. 21.

    Article  CAS  Google Scholar 

Download references

Authors
  1. Frances M. Ross
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ross, F.M. Dynamic Studies of Semiconductor Growth Processes Using In Situ Electron Microscopy. MRS Bulletin 26, 94–101 (2001). https://doi.org/10.1557/mrs2001.295

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/mrs2001.295

Search

Navigation