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Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties

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Abstract

Self-separated Pb(Zr0.52Ti0.48)O3 (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol–gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximum remnant polarization is over 30 μC/cm2 and the electromechanical coupling factor (kt) reaches as high as 0.52. The unique microstructure characteristics of the PZT films, such as their highly dense structure, columnar grains, well-connected grain boundaries, and well-dispersed nanopores, could all contribute to the enhanced piezoelectric and electromechanical properties.

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ACKNOWLEDGMENTS

The research effort at Texas A&M University was supported by National Science Foundation (NSF-1007969 and NSF-0846504). The effort at Los Alamos National Laboratory was performed, in part, at the Center for Integrated Nanotechnologies, a U.S. Department of Energy, Office of Basic Energy Sciences user facility. The effort at University of Southern California was partially supported by National Institutes of Health P41-EB2182. BHP was partially supported by the World Class University program through the National Research Foundation funded by Ministry Of Education, Science and Technology (Grant No. R31-2008-000-10057-0).

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Authors and Affiliations

  1. Materials Science and Engineering Program, Texas A&M University, College Station, Texas, 77843-3128, USA

    Qing Su

  2. Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California, 90089-1111, USA

    Benpeng Zhu

  3. Materials Science and Engineering Program, Texas A&M University, College Station, Texas, 77843-3128, USA

    Joon Hwan Lee

  4. Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas, 77843-3128, USA

    Zhenxing Bi

  5. Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California, 90089-1111, USA

    Kirk Shung

  6. Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California, 90089-1111, USA

    Qifa Zhou

  7. Medical Engineering Course, Graduate school of Engineering, Toin University of Yokohama, Yokohama, 225-8501, Japan

    Shinichi Takeuchi

  8. Division of Quantum Phases & Devices, Department of Physics, Konkuk University, Seoul, 143-701, Korea

    Bae Ho Park

  9. Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Los Alamos, New Mexico, 87545, USA

    Quanxi Jia

  10. Materials Science and Engineering Program and Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas, 77843-3128, USA

    Haiyan Wang

Authors
  1. Qing Su
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  2. Benpeng Zhu
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  3. Joon Hwan Lee
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  4. Zhenxing Bi
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  5. Kirk Shung
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  6. Qifa Zhou
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  7. Shinichi Takeuchi
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  8. Bae Ho Park
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  9. Quanxi Jia
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  10. Haiyan Wang
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Corresponding authors

Correspondence to Qifa Zhou, Quanxi Jia or Haiyan Wang.

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Su, Q., Zhu, B., Lee, J.H. et al. Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties. Journal of Materials Research 26, 1431–1435 (2011). https://doi.org/10.1557/jmr.2011.115

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  • DOI: https://doi.org/10.1557/jmr.2011.115

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