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Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

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Abstract

The optical and electrical properties of “tilted” and “spiral” indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

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Acknowledgments

This work was supported by a Korea Science and Engineering Foundation (KOSEF) grant funded by the Korean government Ministry of Science and Technology (MOST) (No. R01-2007-000-11760-0), and also supported by the MOST/KOSEF through the Quantum Photonic Science Research Center, Korea. The authors would like to thank S.Y. Park and J.S. Lhim of Hanyang University Optical Spectroscopy Lab, for their ellipsometry measurement.

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Authors and Affiliations

  1. School of Electrical Engineering, Korea University, Seoul, 136-701, Korea

    Y. Zhong, Y.C. Shin, C.M. Kim, B.G. Lee, E.H. Kim & T.G. Kim

  2. Department of Physics, Inha University, Incheon, 402-751, Korea

    Y.J. Park, K.M.A. Sobahan & C.K. Hwangbo

  3. Quantum Photonic Science Research Center, Department of Physics, Hanyang University, Seoul, 133-791, Korea

    Y.P. Lee

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  1. Y. Zhong
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  2. Y.C. Shin
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  3. C.M. Kim
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  4. B.G. Lee
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  5. E.H. Kim
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  7. K.M.A. Sobahan
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  8. C.K. Hwangbo
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  10. T.G. Kim
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Correspondence to T.G. Kim.

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Zhong, Y., Shin, Y., Kim, C. et al. Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition. Journal of Materials Research 23, 2500–2505 (2008). https://doi.org/10.1557/jmr.2008.0312

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  • DOI: https://doi.org/10.1557/jmr.2008.0312

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