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Fundamentals of Sputtered Neutral Mass Spectrometry

  • Materials Microanalysis
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Abstract

Sputtered neutral mass spectrometry (SNMS) is a technique for elemental and isotopic analysis with excellent detection limits, with similar sensitivity for all elements and without substantial matrix effects. Particles sputter atomized from the sample surface are ionized and mass spectrometrically measured. Elemental detection limits are routinely 1–10 ppm, but can be as low as 1–10 ppb. Particular modes of SNMS enable the measurement of accurate concentration depth profiles with resolutions approaching 20 Å and the measurement of electrically insulating samples.

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Authors
  1. U. Kaiser
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  2. J. C. Huneke
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Kaiser, U., Huneke, J.C. Fundamentals of Sputtered Neutral Mass Spectrometry. MRS Bulletin 12, 48–51 (1987). https://doi.org/10.1557/S0883769400067221

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