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Introduction to Secondary Ion Mass Spectrometry (SIMS)

  • Chapter
Electron and Ion Spectroscopy of Solids

Part of the book series: NATO Advanced Study Institutes Series ((NSSB,volume 32))

Abstract

This contribution aims to give to the beginner in SIMS a survey of the present state of our knowledge of secondary ion emission, of basic experimental embodiment of today’s SIMS instruments and of the potential of this method for research and as an analytical tool.

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Werner, H.W. (1978). Introduction to Secondary Ion Mass Spectrometry (SIMS). In: Fiermans, L., Vennik, J., Dekeyser, W. (eds) Electron and Ion Spectroscopy of Solids. NATO Advanced Study Institutes Series, vol 32. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-2817-9_8

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  • DOI: https://doi.org/10.1007/978-1-4684-2817-9_8

  • Publisher Name: Springer, Boston, MA

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