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Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection

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Abstract

The fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.

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Authors
  1. C. P. M. Dunselman
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  2. W. M. Arnold Bik
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  3. F. H. P. M. Habraken
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  4. W. F. van der Weg
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Dunselman, C.P.M., Bik, W.M.A., Habraken, F.H.P.M. et al. Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection. MRS Bulletin 12, 35–39 (1987). https://doi.org/10.1557/S0883769400067208

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  • DOI: https://doi.org/10.1557/S0883769400067208

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