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Elemental Analysis of Materials by Methods of Ion-Beam Diagnostics

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Abstract

A brief description of the ion-beam analytical complex used for the work is given. The possibilities of elemental analysis of the materials as a result of using the methods of Rutherford ion backscattering and X‑ray fluorescence under ionic excitation are shown. A brief description of these methods and the conditions for their implementation is given. It is shown that the highest efficiency of elemental analysis is achieved when they are applied together. Experimental data showing the efficiency of using such an analysis in diagnostics of the elemental composition of residues of dry liquids and solid materials, including thin-film ferroelectric films, are presented.

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Funding

This work was carried out within the framework of a state task no. 075-00335-21-00 and was partially supported by the Russian Foundation for Basic Research (project nos. 18-29-11 029, 19-07-00271, and 19-29-03042).

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Authors and Affiliations

  1. Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 141190, Fryazino, Moscow Region, Russia

    M. S. Afanasiev, E. V. Egorov & G. V. Chucheva

  2. Institute for Problems of Microelectronics Technology, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia

    E. V. Egorov & V. K. Egorov

  3. Financial University under the Government of the Russian Federation, 125993, Moscow, Russia

    E. V. Egorov

Authors
  1. M. S. Afanasiev
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  2. E. V. Egorov
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  3. V. K. Egorov
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  4. G. V. Chucheva
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Correspondence to M. S. Afanasiev.

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Afanasiev, M.S., Egorov, E.V., Egorov, V.K. et al. Elemental Analysis of Materials by Methods of Ion-Beam Diagnostics. J. Surf. Investig. 15, 712–716 (2021). https://doi.org/10.1134/S1027451021040029

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  • DOI: https://doi.org/10.1134/S1027451021040029

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