Abstract
This article discusses the underlying principles of Rutherford backscattering spectrometry (RBS). Consideration of the theory of the interaction of high energy ions with solids leads to the conclusion that quantitative elemental analysis of the near-surface composition of solids can be performed by RBS. Examples are given.
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Gossmann, HJ., Feldman, L.C. Materials Analysis with High Energy Ion Beams Part I: Rutherford Backscattering. MRS Bulletin 12, 26–28 (1987). https://doi.org/10.1557/S088376940006718X
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DOI: https://doi.org/10.1557/S088376940006718X