Coatings for Improved Vacuum Materials

Conclusion

The processes for TiN coating of cutting tools and decorative items have been established and are in widespread use for general industrial purposes. TiN coating for UHV applications, however, is in its infancy. The value of TiN as a vacuum material has been demonstrated, and some components are commercially available. However, the deposition processes need to be improved for coating awkward chamber geometries and component materials. The mechanical properties and outgassing characteristics of the TiN coatings are affected by the process used and the deposition conditions. Optimization of the deposition processes for vacuum applications will be achieved only through lengthy and careful experimentation.