Conclusions
A complete aluminum alloy ultrahigh vacuum system has been developed for TRISTAN, the electron-positron colliding beam storage ring at the National Laboratory for High Energy Physics in Tsukuba, Japan. Basic technologies of surface treatment and welding and vacuum components have been applied to vacuum systems for nuclear fusion devices, semiconductor production, general purpose vacuum systems, etc. The present system satisfied conditions such as high performance and high reliability.
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References
H. Ishimaru, J. Vac. Sci. Technol. A2 (1984) p. 1170.
J.R. Chen, C.H. Lee, and Y.C. Liu, Topical Conference on Vacuum Design of Advanced and Compact Synchrotron Light Sources, 1989.
H.F. Dylla, D.M. Manos, P.H. LaMarche, J.C. Citrolo, T.J. Provost, and C.W. Magee, 11th Intl. Vacuum Congress, Cologne, 1989.
M. Miyamoto, Y. Sumi, S. Komaki, K. Narushima, and H. Ishimaru, J. Vac. Sci. Technol. A4 (1986) p. 2515.
M. Suemitsu, T. Kaneko, and N. Miyamoto, J. Vac. Sci. Technol. A5 (1987) p. 37.
Y. Katoh, E. Isoyama, and N. Hasegawa, J. Jpn. Inst. Light Met. 38 (1988) p. 462.
H. Ishimaru, Oyo Butsuri 58(12) (1989) p. 1764.
J.R. Chen, K. Narushima, and H. Ishimaru, J. Vac. Sci. Technol. A3 (1985) p. 2188.
J.R. Chen and Y.C. Liu, J. Vac. Sci. Technol. A5 (1987) p. 262.
J.R. Chen, C.H. Lee, J.C. Chen, H.L. Hsieh, and Y.C. Liu, J. Vac. Sci. Technol. A6 (1987) p. 3422.
S. Saitoh, K. Shimura, T. Iwata, F. Watanabe, T. Momose, and H. Ishimaru, 36th Natl. AVS Symposium, Boston, 1989.
N. Ohta, F. Watanabe, K. Kanazawa, T. Momose, and H. Ishimaru, 36th Natl. AVS Symposium, Bostort, 1989.
H. Ishimaru, J. Vac. Sci. Technol. 15(6) (1987) p. 1853.
H. Ishimaru, Vacuum 32 (1982) p. 759.
H. Ishimaru, Vacuum 33 (1983) p. 339.
H. Saeki, J. Ikeda, and H. Ishimaru, Vacuum 39 (1989) p. 563.
T. Momose, S. Satoh, and H. Ishimaru, Vacuum 34 (1984) p. 806.
H. Ishimaru, K. Narushima, K. Kanazawa, Y. Suetsugu, D. Bintinger, H. Jöstlein, and D. Trbojvic, J. Vac. Sci. Technol. A6 (1988) p. 1293.
I. Sakai, H. Ishimaru, and G. Horikoshi, Vacuum 32 (1982) p. 33.
K. Itoh, K. Waragai, H. Komuro, T. Ishigaki, and H. Ishimaru, 36th National AVS Symposium, Boston, 1989.
H. Ishimaru, T. Kuroda, O. Kaneko, Y. Okano, and K. Sakurai, J. Vac. Sci. Technol. A3 (1985) p. 1703.
H. Hisamatsu, T. Momose, and H. Ishimaru, to be published in Vacuum.
F. Watanabe, J. Vac. Sci. Technol. A5 (1986) p. 242.
F. Watanabe and H. Ishimaru, J. Vac. Sci. Technol. A4 (1986) p. 1720.
F. Watanabe and H. Ishimaru, 11th Intl. Vacuum Congress, Cologne, 1989.
J.R. Chen, K. Narushima, M. Miyamoto, and H. Ishimaru, J. Vac. Sci. Technol. A4 (1985) p. 2515.
H. Ishimaru, J. Vac. Sci. Technol. A7 (1989) p. 2439.
H. Ishimaru, Proceedings of Surface Conditioning of Vacuum Systems (American Vacuum Society Series 8, Los Angeles, 1989).
H. Ishimaru, K. Itoh, T. Ishigaki, H. Komuro, and F. Watanabe, 11th International Vacuum Congress, Cologne, 1989.
M. Mohri, S. Maeda, H. Odagiri, M. Hashiba, T. Yamashina, and H. Ishimaru, Vacuum 34 (1984) p. 643.
F. Watanabe and H. Ishimaru, 36th National AVS Symposium, Boston, 1989.
H. Ishimaru, T. Momose, K. Narushima, H. Mizuno, K. Kanazawa, H. Watanabe, and S. Shimamoto, J. Vac. Sci. Technol. A4 (1986) p. 1762.
H. Ishimaru, Construction Workshop Proceedings, Synchrotron Radiation Research Center, Taiwan, 1988.
T. Momose, K. Kanazawa, H. Hisamatsu, and H. Ishimaru, J. Vac. Sci. Technol. A7 (1989) p. 3092.
T. Momose, J.R. Chen, K. Kanazawa, H. Hisamatsu, and H. Ishimaru, J. Vac. Sci. Technol. A7 (1989) p. 3098.
K. Itoh, T. Ishigaki, A. Kamikawana, and H. Ishimaru, J. Vac. Sci. Technol. A7 (1988, 1989) p. 2435.
S. Nomura, Proceedings of ALVALAB Seminar, December, 1989, p. 175.
K. Itoh, J. Uramoto, and H. Ishimaru, 17th International Conference on Metallurgical Coatings, San Diego, CA, 1990.
H. Saeki, J. Ikeda, and H. Ishimaru, J. Vac. Sci. Technol. A6 (1988) p. 2883.
H. Saeki, J. Ikeda, I. Kohzu, and H. Ishimaru, J. Vac. Sci. Technol. A8 (1990).
Y. Yamagata, T. Higuchi, H. Saeki, and H. Ishimaru, 36th National AVS Symposium, Boston, 1989.
H. Ishimaru, Y. Mikasa, H. Takemura, and A. Miyahara, Proc. Japan-U.S. Workshop on Vacuum Technologies for Fusion Devices, Aug. 1–5, 1988, Inst. of Plasma Physics, Nagoya Univ., IPPJ-T-38, p. 288.
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Ishimaru, H. Developments and Applications for All-Aluminum Alloy Vacuum Systems. MRS Bulletin 15, 23–31 (1990). https://doi.org/10.1557/S0883769400059212
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DOI: https://doi.org/10.1557/S0883769400059212