Skip to main content
Log in

Dislocation Mechanisms of Relaxation in Strained Epitaxial Films

  • Mechanical Behavior of Thin Film
  • Published:
MRS Bulletin Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. J.C. Bean, Science 230 (1985) p. 127.

    Article  CAS  Google Scholar 

  2. B.W. Dodson and P.A. Taylor, Appl. Phys. Lett. 49 (1986) p. 642.

    Article  CAS  Google Scholar 

  3. J.W. Matthews, S. Mader, and T.B. Light, J. Appl. Phys. 41 (1970) p. 3800.

    Article  CAS  Google Scholar 

  4. L.B. Freund, J. Appl. Mech. 54 (1987) p. 553.

    Article  CAS  Google Scholar 

  5. L.B. Freund, J. Mech. Phys. Sol. 38 (1990) p. 657.

    Article  Google Scholar 

  6. D.C. Houghton, J. Appl. Phys. 70 (1991) p. 2136.

    Article  CAS  Google Scholar 

  7. C.G. Tuppen, C.J. Gibbings, and M. Hockly, J. Cryst. Growth 94 (1989) p. 392.

    Article  CAS  Google Scholar 

  8. J.W. Matthews and A.E. Blakeslee, J. Cryst. Growth 27 (1974) p. 118; 29 (1975) p. 273; 32 (1976) p. 265.

    CAS  Google Scholar 

  9. I.J. Fritz, Appl. Phys. Lett. 51 (1987) p. 1080.

    Article  CAS  Google Scholar 

  10. P.L. Gourley, I.J. Fritz, and L.R. Dawson, Appl. Phys. Lett. 52 (1988) p. 377.

    Article  CAS  Google Scholar 

  11. J.W. Matthews, J. Vac. Sci. Technol. 12 (1975) p. 126.

    Article  CAS  Google Scholar 

  12. R.C. Cammarata and K. Sieradzki, Appl. Phys. Lett. 55 (1989) p. 1197.

    Article  CAS  Google Scholar 

  13. H. Alexander, in Dislocations in Solids 7, edited by F.R.N. Nabarro (Elsevier, Amsterdam, 1986) p. 115–234.

    Google Scholar 

  14. D.C. Houghton, D.D. Perovic, J.M. Baribeau, and G.C. Weatherly, J. Appl. Phys. 67 (1990) p. 1850.

    Article  CAS  Google Scholar 

  15. W.D. Nix, D.B. Noble, and Turlo J.F., in Thin Films: Stresses and Mechanical Properties II, edited by M.F. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen (Mater Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 315–330.

    CAS  Google Scholar 

  16. L.B. Freund, A. Bower, and J.C. Ramirez, in Thin Films: Stresses and Mechanical Properties, edited by J. Bravman, W.D. Nix, D.M. Barnett, and D.A. Smith (Mater Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989) p. 139–152.

    Google Scholar 

  17. F.K. LeGoues, B.S. Meyerson, and J.F. Morar, Phys. Rev. Lett. 63 (1989) p. 1826.

    Article  CAS  Google Scholar 

  18. D.C. Paine, D.J. Howard, and N.G. Stoffel, J. Electron. Mat. 20 (1991) p. 735.

    Article  CAS  Google Scholar 

  19. J.H. van der Merwe and N.G. van der Berg, Surf. Sci. 32 (1972) p. 1.

    Article  Google Scholar 

  20. J.H. van der Merwe, J. Electron. Mat. 20 (1991) p. 793.

    Article  Google Scholar 

  21. W.A. Jesser and J.H. van der Merwe, J. Appl. Phys. 63 (1988) p. 1509; J. Appl. Phys. 63 (1988) p. 1928.

    Article  Google Scholar 

  22. E.A. Fitzgerald, G.P. Watson, R.E. Proano, D.B. Ast, P.D. Kirchner, G.D. Pettit, and J.M. Woodall, J. Appl. Phys. 65 (1989) p. 2220.

    Article  CAS  Google Scholar 

  23. F.C. Frank and J.H. van der Merwe, Proc. R. Soc. London, Ser. A 198 (1949) p. 205; ibid., p. 216.

    Article  CAS  Google Scholar 

  24. W.D. Nix, Met. Trans. 20A (1989) p. 2217.

    Article  CAS  Google Scholar 

  25. D.C. Paine, D.J. Howard, D. Luo, R.N. Sacks, and T.C. Eschrich, in Layered Structures—Heteroepitaxy, Superlattices, Strain and Metastability, edited by B.W. Dodson, L.J. Schowalter, J.E. Cunningham, and F.H. Pollak, (Mater. Res. Soc. Symp. Proc. 160, Pittsburgh, PA, 1990), p. 123–128.

    CAS  Google Scholar 

  26. J. Petrozullo, B.L. Greenberg, D.A. Cammack, and R. Dalby, J. Appl. Phys. 63 (1988) p. 2299.

    Article  Google Scholar 

  27. J.R. Willis, S.C. Jain, and R. Bullough, Philos. Mag. A62 (1990) p. 115; Appl. Phys. Lett. 59 (1991) p. 920.

    Article  Google Scholar 

  28. J.P. Hirth and X. Feng, J. Appl. Phys. 67 (1990) p. 3343.

    Article  Google Scholar 

  29. L.B. Freund, J. Appl. Phys. 68 (1990) p. 2073.

    Article  Google Scholar 

  30. R. Hull, J.C. Bean, D.J. Werder, and R.E. Leibenguth, Phys. Rev. B 40 (1989) p. 1681.

    Article  CAS  Google Scholar 

  31. J.C. Bean, L.C. Feldman, A.T. Fiory, S. Nakahara, and I.K. Robinson, J. Vac. Sci. Technol. A 2 (1984) p. 436.

    Article  CAS  Google Scholar 

  32. A.T. Fiory, J.C. Bean, R. Hull, and S. Nakahara, Phys. Rev. B 31 (1984) p. 4063.

    Article  Google Scholar 

  33. J.Y. Tsao and B.W. Dodson, Appl. Phys. Lett. 53 (1988) p. 848.

    Article  CAS  Google Scholar 

  34. J.Y. Tsao, B.W. Dodson, S.T. Picraux, and D.M. Cornelison, Phys. Rev. Lett. 59 (1987) p. 2455.

    Article  CAS  Google Scholar 

  35. L.B. Freund and R. Hull, J. Appl. Phys. 71 (1992).

  36. C.G. Tuppen and C.J. Gibbings, J. Appl. Phys. 68 (1990) p. 1526.

    Article  CAS  Google Scholar 

  37. R. Hull, J.C. Bean, D. Bahnck, L.J. Peticolas, K.T. Short, and F.C. Unterwald, J. Appl. Phys. 70 (1991) p. 2052.

    Article  CAS  Google Scholar 

  38. B.W. Dodson and J.Y. Tsao, Appl. Phys. Lett. 51 (1987) p. 1325.

    Article  CAS  Google Scholar 

  39. J.R. Rice, J. Appl. Mech. 37 (1970) p. 728.

    Article  Google Scholar 

  40. S.V. Kamat and J.P. Hirth, J. Appl. Phys. 67 (1990) p. 6844.

    Article  Google Scholar 

  41. D.D. Perovic, G.C. Weatherly, J.M. Baribeau, and D.C. Houghton, Thin Solid Films 183 (1989) p. 141.

    Article  CAS  Google Scholar 

  42. D.J. Eaglesham, E.P. Kvam, D.M. Maher, C.J. Humphreys, and J.C. Bean, Philos. Mag. A59 (1989) p. 1059.

    Article  Google Scholar 

  43. S.M. Hu, J. Appl. Phys. 50 (1979) p. 4661.

    Article  Google Scholar 

  44. D. Luo, D.J. Howard, and D.C. Paine, in Thin Films: Stresses and Mechanical Properties III, edited by W.D. Nix, J.C. Bravman, E. Arzt, and L.B. Freund (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992).

  45. I.H. Hsing, D. Lishan, R. Mirin, V. Jayaraman, T. Yasuda, E.L. Hu, and J. Bowers, Appl. Phys. Lett. 59 (1991) p. 1875.

    Article  Google Scholar 

  46. D.J. Srolovitz, Acta Metall. 37 (1989) p. 621.

    Article  Google Scholar 

  47. B.J. Spencer, P.W. Voorhees, and S.H. Davis, Phys. Rev. Lett. 67 (1991) p. 3696.

    Article  CAS  Google Scholar 

  48. F.K. LeGoues, M. Copel, and R. Trump, Phys. Ren Lett. 63 (1989) p. 1826.

    Article  CAS  Google Scholar 

  49. S.S. Iyer and F.K. LeGoues, J. Appl. Phys. 65 (1989) p. 4693.

    Article  CAS  Google Scholar 

Download references

Rights and permissions

Reprints and permissions

About this article

Cite this article

Dislocation Mechanisms of Relaxation in Strained Epitaxial Films. MRS Bulletin 17, 52–60 (1992). https://doi.org/10.1557/S088376940004166X

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/S088376940004166X

Navigation