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Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films

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Abstract

Rocking curve texture measurements were made on thin films of zinc oxide (ZnO) and platinum (Pt) using a powder x-ray diffractometer, and, in the case of ZnO, an area detector. The intensity corrections for defocussing and other geometric factors were made using a technique and associated software (Texture Plus*) developed at NIST. In both thin film systems, the texture was axisymmetric (fiber) and sharp, with full width at half maximum values of about 2.5°. Care was taken in the Pt case to ensure that the linear range of the x-ray detector was used to measure the intensities; for the ZnO data the degree of detector non-linearity was determined, and corrections were applied where necessary. The suitability of the Pt films for thin film texture standards was studied.

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References

  1. G.R. Fox, in Ferroelectric Thin Films VIII, edited by R.W. Schwartz, P.C. McIntyre, Y. Miyasaka, S.R. Summerfelt, and D. Wouters, (Mater. Res. Soc. Proc., 596, Pittsburgh, PA, 2000), p. 205–210.

    CAS  Google Scholar 

  2. Mark D. Vaudin and Debra L. Kaiser, NIST Journal of Research, 106, 3, 605–608, (2001).

    Article  CAS  Google Scholar 

  3. G.R. Kowach and M.D. Vaudin, unpublished work.

  4. F. Chu, G. Hickert, T.D. Hadnagy, and K.K. Suu, Integrated Ferroelectrics, 26, p. 749 (1999).

    Article  CAS  Google Scholar 

  5. Mark D. Vaudin, Martin W. Rupich, Martha Jowett, G.N. Riley and J. F. Bingert, J. Mater. Res. 13, 10, 2910–2919 (1998).

    Article  CAS  Google Scholar 

  6. Mark D. Vaudin, Twelfth International Conference on Texture of Materials, 186–191, National Research Council of Canada Research Press, Ottawa, 1999.

    Google Scholar 

  7. TexturePlus, software package available on the web at: http://www.ceramics.nist.gov/webbook/TexturePlus/texture.htm, 2000

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Authors and Affiliations

  1. National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA

    Mark D. Vaudin

  2. Ramtron International Corporation, Colorado Springs, CO, 80921, USA

    Glen R. Fox

  3. Agere Systems, Breinigsville, PA, USA

    Glen R. Kowach

Authors
  1. Mark D. Vaudin
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  2. Glen R. Fox
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  3. Glen R. Kowach
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Vaudin, M.D., Fox, G.R. & Kowach, G.R. Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films. MRS Online Proceedings Library 721, 12 (2002). https://doi.org/10.1557/PROC-721-J1.2

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  • DOI: https://doi.org/10.1557/PROC-721-J1.2

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