Abstract
Silicon multiquantum wells ranging in width from 3 to 15 nm were deposited on closely lattice-matched ZnS barriers. MOCVD was used to deposit the ZnS films using diethyl zinc and hydrogen sulfide as the precursors; disilane was used to deposit silicon layers at low temperatures. Single and multiple silicon nano-layers were observed by transmission electron microscopy and secondary ion mass spectrometry. Photoluminesence studies revealed emissions peaks which were blue-shifted with respect to the edge emission from bulk silicon substrates. The observation of emission from silicon nanostructures shifted to wavelengths as short as the 800-850 nm range is consistent with the effects of quantum confinement in silicon nanostructures.
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This work was supported in part by an SBIR contract DE-FG02-93ER81620 funded by the United States Department of Energy.
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Maruska, H.P., Sudharsanan, R., Bretschneider, E. et al. Carrier Confinement Effects in Epitaxial Silicon Quantum Wells Prepared by MOCVD. MRS Online Proceedings Library 358, 987 (1994). https://doi.org/10.1557/PROC-358-987
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DOI: https://doi.org/10.1557/PROC-358-987