Abstract
10×16 GaAs/AlGaAs quantum well infrared detector arrays with peak responsivity at 9.3μm have been achieved with front-side normal illumination based on a waveguide of doubly periodic grating coupler. The detector array with a wideband response from 4.2μm to 10.3μm is demonstrated by optimizing the quantum well structures and device processes. A peak detectivity D*λ =2.9×1010 cmHz1/2 /W and high a responsivity Rp=0.37A/W have been obtained at λp=9.3μm and T=77K. The dark current densities of the detectors in the array were smaller than 6.2×10−6 A/cm2 with the detectors biased (Vb=3.2V) for maximum detectivity.
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Li, JM., Zheng, HQ., Zeng, YP. et al. GaAs/AlGaAs Multiquantum Well Infrared Detector Array with 6.0 μm Response Width. MRS Online Proceedings Library 340, 83–88 (1994). https://doi.org/10.1557/PROC-340-83
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DOI: https://doi.org/10.1557/PROC-340-83