Skip to main content
SpringerLink
Log in

Application of Desorption Mass Spectrometry to Molecular Beam Epitaxy

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Molecular beam epitaxy (MBE) is the most powerful crystal growth technique available in terms of the range of structures which can be produced. However, further advances in MBEprocess monitoring and control are required to produce the most demanding structures. Also, process yield, cost, and throughput must be improved for MBE to gain in production worthiness. Because of these issues, there currently is much research activity focusing on the development of advanced in-situ sensors for improved growth parameter monitoring and control. Desorption mass spectrometry (DMS) is an in-situ sensor technique for detecting species leaving the substrate during MBE growth processing. Since in general all surface processes affect desorption rates, and all growth parameters affect surface processes, DMS can be utilized to monitor a variety of MBE growth parameters and phenomena. Theimplementation of simple feedback techniques which link DMS error signals to changes in one or more growth parameters then provides for continuous control of desorption rates. This paper reviews some of the most recent accomplishments in the application of DMS forimproved growth parameter monitoring and control. Additionally, anticipated future directions in the application of DMS to epitaxial growth are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T. M. Brennan, J. Y. Tsao, B. E. Hammons, J. F. Klein, and E. D. Jones, J. Vac. Sci. Technol. B 7, 277 (1989).

    Article  CAS  Google Scholar 

  2. G. Zagatta, H. Müller, N. Böwering, and U. Heinzmann, Rev. Sci. Instrum. 65, 359 (1994).

    Article  CAS  Google Scholar 

  3. R. Kaspi, W. T. Cooley, C. R. Jones, and K. R. Evans, to be published.

  4. C. T. Foxon, J. A. Harvey, and B. A. Joyce, J. Phys. Chem Solids 34, 1693 (1973).

    Article  CAS  Google Scholar 

  5. K. R. Evans, C. Stutz, E. N. Taylor, and J. E. Ehret, J. Vac. Sci. Technol. B 9, 2427 (1991).

    Article  CAS  Google Scholar 

  6. K. R. Evans, C. E. Stutz, P. W. Yu, and C. R. Wie, J. Vac. Sci. Technol. B 8, 271 (1990).

    Article  CAS  Google Scholar 

  7. K. R. Evans, C. Stutz, D. K. Lorance, and R. L. Jones, J. Vac. Sci. Technol. B 7, 259 (1989).

    Article  CAS  Google Scholar 

  8. See, for example, S. A. Chalmers and K. P. Killeen, Appl. Phys. Lett. 63, 3131 (1993).

    Article  CAS  Google Scholar 

  9. J. Y. Tsao, T. M. Brennan, J. F. Klein, and B. E. Hammons, Appl. Phys. Lett. 55, 777 (1989).

    Article  CAS  Google Scholar 

  10. R. Kaspi, private communication.

  11. K. R. Evans, C. E. Stutz, E. N. Taylor, and J. E. Ehret, Appl. Surf. Sci. 56, 677 (1992).

    Article  Google Scholar 

  12. A. J. SpringThorpe and P. Mandeville, J. Vac. Sci. Technol. B 6, 754 (1988).

    Article  Google Scholar 

  13. See, for example, Moison et al., J. Crystal Growth 111, 141 (1991), and references therein.

    Article  CAS  Google Scholar 

  14. Y. C. Kao, F. G. Cellii, and H. Y. Liu, J. Vac. Sci. Technol. B 11, 1023 (1993)

    Article  CAS  Google Scholar 

  15. A. J. SpringThorpe and D. J. Arent, J. Vac. Sci. B 11, 783 (1993).

    Article  CAS  Google Scholar 

  16. K. R. Evans, J. E. Ehret, C. R. Jones, R. Kaspi, and E. N. Taylor, to be published.

  17. K. R. Evans, R. Kaspi, C. R. Jones, R. E. Sherriff, V. Jogai, and D. C. Reynolds, J. Cryst. Growth 127, 523 (1993).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. WL/ELRA, Solid State Electronics Directorate, Wright Laboratory, WPAFB, OH, USA

    Keith R. Evans

Authors
  1. Keith R. Evans
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Evans, K.R. Application of Desorption Mass Spectrometry to Molecular Beam Epitaxy. MRS Online Proceedings Library 340, 13–22 (1994). https://doi.org/10.1557/PROC-340-13

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-340-13

Search

Navigation