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Low-energy ion induced sputtering of pre-patterned fused silica surfaces

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Abstract

Ripple formation and smoothing of pre-patterned fused silica surfaces by low-energy ion beam erosion have been investigated. As pre-pattern ripple surfaces produced by low-energy Ar+ ion beam erosion were used. In addition to the enhanced ripple formation on the pre-patterned surfaces also the smoothing characteristics of surface is changed. Due to the anisotropic surface roughness of the ripple pattern the irradiation direction with respect to the pre-pattern becomes important. It is suggested that all of these effects are related to surface gradient dependent sputtering and therefore it is an important mechanisms also in the low-energy ion beam erosion of fused silica surfaces.

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Authors and Affiliations

  1. Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM), Permoserstr. 15, D-04318, Leipzig, Germany

    J. Völlner, B. Ziberi, F. Frost & B. Rauschenbach

Authors
  1. J. Völlner
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  2. B. Ziberi
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  3. F. Frost
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  4. B. Rauschenbach
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Correspondence to J. Völlner.

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Völlner, J., Ziberi, B., Frost, F. et al. Low-energy ion induced sputtering of pre-patterned fused silica surfaces. MRS Online Proceedings Library 1181, 145–150 (2009). https://doi.org/10.1557/PROC-1181-DD13-15

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  • DOI: https://doi.org/10.1557/PROC-1181-DD13-15

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