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Fabrication of micro-fluid-channel structures by focused ion beam techniques

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Abstract

One of the new applications of focused Ga ion beam (Ga FIB) techniques in the fabrication of micro-fluid-channels on plate glass was demonstrated. After discussing the features of the FIB-etched patterns, narrow or Y-shaped channels were fabricated by FIB etching on a patterned plate glass prepared by photolithography and wet etching. Micro-fluid devices were then constructed using a polydimethylsiloxane (PDMS) sheet and silicone rubber tubes, and the water (or ink) flow in the devices was observed under a microscope using a syringe pump. Although no discussion based on fluid mechanics has been carried out at present, the present results indicate the possibility of applying FIB techniques to fabricate micro-fluid devices that can be used in bio- and/or chemical-related fields.

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Acknowledgments

The authors would also like to thank K. Gamo, Y. Yuba, and A. Sakai for useful discussions and K. Kawasaki for his technical assistance. This work was partially supported by the 21st Century COE Program (G18) of the Japan Society for the Promotion of Science. One of the authors (J.Y.) is also grateful to the Murata Science Foundation for financial support.

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Authors and Affiliations

  1. School of Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan

    Junichi Yanagisawa

  2. Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan

    Hiroaki Kobayashi, Kakunen Koreyama & Yoichi Akasaka

Authors
  1. Junichi Yanagisawa
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  2. Hiroaki Kobayashi
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  3. Kakunen Koreyama
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  4. Yoichi Akasaka
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Yanagisawa, J., Kobayashi, H., Koreyama, K. et al. Fabrication of micro-fluid-channel structures by focused ion beam techniques. MRS Online Proceedings Library 1181, 34–41 (2009). https://doi.org/10.1557/PROC-1181-DD03-01

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  • DOI: https://doi.org/10.1557/PROC-1181-DD03-01

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