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Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina

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We present result following localized ion implantation of rutile titanium dioxide (TiO2) using anodic porous alumina as a mask. The implantation were performed with 100 keV 56Fe+ ions using a fluence of 1.3-1016 ions/cm2. The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.

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Acknowledgments

This work was supported in part by the Spanish Ministry of Education under Grant MAT2007-6042. J. Jensen thanks the Carl Tryggers Foundation and Linköping University through the VR Linneaus grant LiLi-NFM for financial support. M.J. Thanks the CAM for the financial support.

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Authors and Affiliations

  1. Thin Film Physics Division, IFM, Linköping University, SE-581 83, Linköping, Sweden

    J. Jensen & M. Vázquez

  2. Instituto de Ciencia de Materiales de Madrid, CSIC, 28043, Madrid, Spain

    R. Sanz, M. Jaafar, M. Hernández-Vélez & A. Asenjo

  3. Applied Physics Department, Universidad Autónoma de Madrid, 28043, Madrid, Spain

    M. Hernández-Vélez

  4. Royal Institute of Technology, ICT-MAP, SE-164 40, Stockholm, Sweden

    A. Hallén

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  1. J. Jensen
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  2. R. Sanz
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  4. M. Hernández-Vélez
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  7. M. Vázquez
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Jensen, J., Sanz, R., Jaafar, M. et al. Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina. MRS Online Proceedings Library 1181, 23–28 (2009). https://doi.org/10.1557/PROC-1181-DD01-04

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  • DOI: https://doi.org/10.1557/PROC-1181-DD01-04

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