Abstract
Multilayers of TiC/Ti and TiC/B4C have been deposited by pulsed laser deposition. Ti, B4C, and TiC targets were used to deposit multilayer films onto 440C steel and silicon substrates at 40 °C. The structural, compositional, and mechanical properties of the multilayers were examined by x-ray diffraction, x-ray photoelectron spectroscopy, transmission electron microscopy, and nanoindentation techniques. Tribological properties were also evaluated using a pin-on-disc friction and wear test. The TiC/Ti films were found to have a crystalline structure, and both (200)TiC/(100)Ti and (111)TiC/(101)Ti orientation relationships were found in these films. In the TiC/B4C films, only the sample with the largest bilayer thickness (25 nm) had significant crystallinity and only the TiC layer was crystalline. X-ray photoelectron spectroscopy depth profiles confirmed the presence of composition modulations in these films. Nanoindentation tests of the TiC/Ti multilayers showed hardness levels exceeding that predicted by the rule-of-mixtures. The TiC/B4C multilayers showed increasing hardness with decreasing bilayer thickness but reached only 22 GPa. The pin-on-disc tests gave friction values ranging from 0.3 to 0.9 for both sets of films. These results were correlated with the degree of crystallinity and grain structure of the films.
Similar content being viewed by others
References
D.M. Tench and J.Y. White, Metall. Trans. A 15A, 2039 (1984).
R.F. Bunshah, R. Nimmagadda, H.J. Doerr, B.A. Movchan, N.I. Grechanuk, and E.V. Dabizha, Thin Solid Films 72, 261 (1980).
R.C. Cammarata, T.E. Schlesinger, C. Kim, S.E. Qadri, and A.S. Edelstein, Appl. Phys. Lett. 56, 1862 (1990).
S.L. Lehoczky, J. Appl. Phys. 49, 5479 (1978).
J.E. Krzanowski and P. Duggan, in Thin Films: Stresses and Mechanical Properties V, edited by S.P. Baker, P. Børgesen, P.H. Townsend, C.A. Ross, and C.A. Volkert (Mater. Res. Soc. Symp. Proc. 356, Pittsburgh, PA, 1995), p. 391.
P. Yashar, S.A. Barnett, J. Rechner, and W.D. Sproul, J. Vac. Sci. Tech, A 16, 2913 (1998).
U. Helmerson, S. Todorova, S.A. Barnett, J.E. Sundgren, L.C. Markett, and J.E. Greene, J. Appl. Phys. 62, 481 (1987).
M. Shinn, L. Hultman, and S.A. Barnett, J. Mater. Res 7, 901 (1992).
E. Kusano, M. Kitagawa, H. Nanto, and A. Kinbara, J. Vac. Sci. Technol., A 16, 1272 (1998).
X. Wang, A. Kolitsch, and W. Mo¨ller, Appl. Phys. Lett. 71, 1951 (1997).
J.E. Krzanowski, in Thin Films: Stress and Mechanical Properties III, edited by W.D. Nix, J.C. Brauman, E. Arzt, and L.B. Freund (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992), p. 509.
J.E. Krzanowski, Scr. Met. Mater. 25, 1465 (1991).
X. Chu and S.A. Barnett, J. Appl. Phys. 77, 4403 (1995).
C.H. Lui, W-Z. Li, and H-D. Li, J. Mater. Res. 11, 2231 (1996).
R. Obbard and T. Gross, MRS Proceedings, Fall, Boston, MA (2001, unpublished).
A.R. Phani and J.E. Krzanowski, University of New Hampshire (unpublished research).
W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).
J-E. Sundgren, B-O. Johansson, and S-E. Karlsson, Thin Solid Films 105, 353 (1983).
A. Zalar, S. Hofmann, P. Panjan, and V. Krasevec, Thin Solid Films 220, 191 (1992).
J.E. Krzanowski and R.E. Leuchtner, J. Am. Ceram. Soc. 80, 1277 (1997).
A.R. Phani, J.E. Krzanowski, and J.J. Nainaparampril, J. Vac. Sci. Technol., A 19, 2252 (2001).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Phani, A.R., Krzanowski, J.E. & Nainaparampil, J.J. Structural and mechanical properties of TiC/Ti and TiC/B4C multilayers deposited by pulsed laser deposition. Journal of Materials Research 17, 1390–1398 (2002). https://doi.org/10.1557/JMR.2002.0207
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.2002.0207