Skip to main content
SpringerLink
Log in

Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

The optical constants of Si/ZnO composite films grown on quartz glass substrates were determined in the spectral range 1.5–5.0 eV by spectroscopic ellipsometry using a rotating-analyzer ellipsometer. The structure of the samples was modeled by a two-phase (substrate–film) model, and the optical functions of the film were parameterized through different effective medium approximations. The results allowed us to estimate the microstructural film parameters, such as film thickness, the volume fractions of each of the constituents, and optical constants.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1997).

    Article  CAS  Google Scholar 

  2. G.E. Jellison Jr, J. Appl. Phys. 69, 7627 (1991); G.E. Jellison, Jr., Appl. Opt. 30, 3354 (1991); in Data Reduction and Error Analysis for the Physics-Sciences edited by P.R. Bevington (McGraw-Hill, New York, 1969).

    Google Scholar 

  3. F.G. Bell and L. Ley, Phys Rev. B 37, 8383 (1988).

    Article  CAS  Google Scholar 

  4. G.M. Ingo, N. Zacchetti, D. Della Sala, and C. Coluzza, J. Vac. Sci. Technol. A 7, 3048 (1989).

    Article  CAS  Google Scholar 

  5. S. Hasegawa, L. He, T. Inokuma, and Y. Kurata, Phys. Rev. B 46, 12478 (1992).

    Article  CAS  Google Scholar 

  6. D.A.G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).

    Article  CAS  Google Scholar 

  7. A.R. Forouhi and I. Bloomer, Phys. Rev. B 34, 7018 (1986).

    Article  CAS  Google Scholar 

  8. M. Erman, J.B. Theeten, P. Chambon, S.M. Kelso, and D.E. Aspnes, J. Appl. Phys. 56, 2664 (1984).

    Article  CAS  Google Scholar 

  9. J.L. Freeouf, Phys. Rev. B 7, 3810 (1973).

    Article  CAS  Google Scholar 

  10. U. Pal, N. Koshizaki, S. Terauchi, and T. Sasaki., Microsc. Microanal. Microstruct. 8, 403 (1997).

    Article  CAS  Google Scholar 

  11. S.S. Mitra, in Handbook of Optical Constants of Solids, edited by E.D. Palik (Academic Press, Orlando, FL, 1985), Vol. 1, Ch. 11.

    Article  CAS  Google Scholar 

  12. R.H. Havemann, M.K. Jain, R.S. List, A.R. Ralston, W-Y. Shih, C. Jin, M.C. Chang, E.M. Zielinski, G.A. Dixit, A. Singh, S.W. Russell, J.F. Gaynor, A.J. McKerrow, and W.W. Lee, in Low-Dielectric Constant Materials IV, edited by C. Chiang, P.S. Ho, T-M. Lu, and J.T. Wetzel (Mater. Res. Soc. Symp. Proc. 511, Warrendale, PA, 1998), pp. 3–14.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Centro de Investigaciones en Materiales y Metalurgia (CIMyM), Universidad Autónoma del Estado de Hidalgo, Carretera Pachuca-Tulancingo Km. 4.5, 42074, Pachuca, Hgo., México

    J. García-Serrano

  2. National Institute of Advanced Industrial Science and Technology, Nanoarchitectonics Research Center, Central 5, 1-1-1 Higashi, 305-8565, Tsukuba, Ibaraki, Japan

    N. Koshizaki & T. Sasaki

  3. Instituto de Física, Universidad Autónoma de Puebla, Apdo. Postal J-48, 72570, Puebla, Pue., México

    G. Martínez-Montes & U. Pal

Authors
  1. J. García-Serrano
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. N. Koshizaki
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. Sasaki
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. G. Martínez-Montes
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. U. Pal
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to U. Pal.

Rights and permissions

Reprints and permissions

About this article

Cite this article

García-Serrano, J., Koshizaki, N., Sasaki, T. et al. Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry. Journal of Materials Research 16, 3554–3559 (2001). https://doi.org/10.1557/JMR.2001.0487

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.2001.0487

Search

Navigation